JPS54109897A - Specimen analytical apparatus in scanning electron microscope or the like - Google Patents

Specimen analytical apparatus in scanning electron microscope or the like

Info

Publication number
JPS54109897A
JPS54109897A JP1676978A JP1676978A JPS54109897A JP S54109897 A JPS54109897 A JP S54109897A JP 1676978 A JP1676978 A JP 1676978A JP 1676978 A JP1676978 A JP 1676978A JP S54109897 A JPS54109897 A JP S54109897A
Authority
JP
Japan
Prior art keywords
signal
specimen
electron
undulation
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1676978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248186B2 (enrdf_load_stackoverflow
Inventor
Tadashi Watanabe
Jiyun Suzumi
Kiyoshi Harasawa
Yoshiaki Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1676978A priority Critical patent/JPS54109897A/ja
Publication of JPS54109897A publication Critical patent/JPS54109897A/ja
Publication of JPS6248186B2 publication Critical patent/JPS6248186B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1676978A 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like Granted JPS54109897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1676978A JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1676978A JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS54109897A true JPS54109897A (en) 1979-08-28
JPS6248186B2 JPS6248186B2 (enrdf_load_stackoverflow) 1987-10-13

Family

ID=11925416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1676978A Granted JPS54109897A (en) 1978-02-16 1978-02-16 Specimen analytical apparatus in scanning electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS54109897A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57653U (enrdf_load_stackoverflow) * 1980-05-30 1982-01-05
JPS61264241A (ja) * 1985-05-17 1986-11-22 Shimadzu Corp Ｘ線光電子分光装置
WO1995000835A1 (fr) * 1993-06-23 1995-01-05 Research Development Corporation Of Japan Procede et appareil pour le reglage d'un dispositif a faisceau d'electrons

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06109370A (ja) * 1992-09-25 1994-04-19 Mitsubishi Electric Corp 直流式黒鉛化炉

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121891A (enrdf_load_stackoverflow) * 1974-08-14 1976-02-21 Tokyo Shibaura Electric Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121891A (enrdf_load_stackoverflow) * 1974-08-14 1976-02-21 Tokyo Shibaura Electric Co

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57653U (enrdf_load_stackoverflow) * 1980-05-30 1982-01-05
JPS61264241A (ja) * 1985-05-17 1986-11-22 Shimadzu Corp Ｘ線光電子分光装置
WO1995000835A1 (fr) * 1993-06-23 1995-01-05 Research Development Corporation Of Japan Procede et appareil pour le reglage d'un dispositif a faisceau d'electrons

Also Published As

Publication number Publication date
JPS6248186B2 (enrdf_load_stackoverflow) 1987-10-13

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