JPS54105165A - Method of forming soft film for x ray lithography - Google Patents

Method of forming soft film for x ray lithography

Info

Publication number
JPS54105165A
JPS54105165A JP1188878A JP1188878A JPS54105165A JP S54105165 A JPS54105165 A JP S54105165A JP 1188878 A JP1188878 A JP 1188878A JP 1188878 A JP1188878 A JP 1188878A JP S54105165 A JPS54105165 A JP S54105165A
Authority
JP
Japan
Prior art keywords
soft film
ray lithography
forming soft
forming
lithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1188878A
Other languages
Japanese (ja)
Other versions
JPS60370B2 (en
Inventor
Masaomi Kameyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP53011888A priority Critical patent/JPS60370B2/en
Publication of JPS54105165A publication Critical patent/JPS54105165A/en
Publication of JPS60370B2 publication Critical patent/JPS60370B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP53011888A 1978-02-07 1978-02-07 How to make a film for soft X-ray lithography Expired JPS60370B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53011888A JPS60370B2 (en) 1978-02-07 1978-02-07 How to make a film for soft X-ray lithography

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53011888A JPS60370B2 (en) 1978-02-07 1978-02-07 How to make a film for soft X-ray lithography

Publications (2)

Publication Number Publication Date
JPS54105165A true JPS54105165A (en) 1979-08-17
JPS60370B2 JPS60370B2 (en) 1985-01-08

Family

ID=11790256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53011888A Expired JPS60370B2 (en) 1978-02-07 1978-02-07 How to make a film for soft X-ray lithography

Country Status (1)

Country Link
JP (1) JPS60370B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000309026A (en) * 1999-04-27 2000-11-07 Material Design:Kk Extremely thin-gauge film and manufacture of the film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000309026A (en) * 1999-04-27 2000-11-07 Material Design:Kk Extremely thin-gauge film and manufacture of the film

Also Published As

Publication number Publication date
JPS60370B2 (en) 1985-01-08

Similar Documents

Publication Publication Date Title
JPS5560960A (en) Composition for developing electrostatic image and method of development
JPS54143074A (en) Method of forming mask
JPS54121114A (en) Method of correcting developing profile of photoresist
JPS54131935A (en) Method of fabricating positive resist image
JPS5567135A (en) Method of forming metallic film of semiconductor device
DE3066694D1 (en) Method of electron beam exposure
JPS55103780A (en) Method of manufacturing piezooelectric film
JPS54135003A (en) Method of measuring reduction of halfftone film
JPS5533087A (en) Method of forming liquiddphase epitaxial film
JPS55138892A (en) Method of forming thin film
JPS54105165A (en) Method of forming soft film for x ray lithography
JPS5582650A (en) Method of making compound film
JPS5471989A (en) Method of developing electron ray resist
JPS54111662A (en) Method of producing film condenser
JPS53134366A (en) Method of forming resist film
JPS54141571A (en) Mask for soft xxray lithograph
JPS559472A (en) Method of forming manganage oxide film
JPS553679A (en) Method of forming thick film fine pattern
JPS5599793A (en) Method of forming thick film
JPS5497782A (en) Method of forming photoresist film
JPS54129396A (en) Method of producing piezoothin film
JPS54113343A (en) Fabrication of image by electrophotographic method
JPS5471988A (en) Method of developing electron ray resist
JPS55135658A (en) Method of reinforcing waterrproof film
JPS5493057A (en) Method of forming inflation film