JPS54129396A - Method of producing piezoothin film - Google Patents
Method of producing piezoothin filmInfo
- Publication number
- JPS54129396A JPS54129396A JP3738978A JP3738978A JPS54129396A JP S54129396 A JPS54129396 A JP S54129396A JP 3738978 A JP3738978 A JP 3738978A JP 3738978 A JP3738978 A JP 3738978A JP S54129396 A JPS54129396 A JP S54129396A
- Authority
- JP
- Japan
- Prior art keywords
- piezoothin
- producing
- film
- producing piezoothin
- piezoothin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3738978A JPS54129396A (en) | 1978-03-30 | 1978-03-30 | Method of producing piezoothin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3738978A JPS54129396A (en) | 1978-03-30 | 1978-03-30 | Method of producing piezoothin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54129396A true JPS54129396A (en) | 1979-10-06 |
Family
ID=12496164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3738978A Pending JPS54129396A (en) | 1978-03-30 | 1978-03-30 | Method of producing piezoothin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54129396A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63176466A (en) * | 1987-01-12 | 1988-07-20 | Toyobo Co Ltd | Sputtering device |
JPH01131029A (en) * | 1987-11-13 | 1989-05-23 | Nippon Telegr & Teleph Corp <Ntt> | Manganese oxide amorphous substance, production thereof and cell |
-
1978
- 1978-03-30 JP JP3738978A patent/JPS54129396A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63176466A (en) * | 1987-01-12 | 1988-07-20 | Toyobo Co Ltd | Sputtering device |
JPH01131029A (en) * | 1987-11-13 | 1989-05-23 | Nippon Telegr & Teleph Corp <Ntt> | Manganese oxide amorphous substance, production thereof and cell |
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