JPS54129396A - Method of producing piezoothin film - Google Patents

Method of producing piezoothin film

Info

Publication number
JPS54129396A
JPS54129396A JP3738978A JP3738978A JPS54129396A JP S54129396 A JPS54129396 A JP S54129396A JP 3738978 A JP3738978 A JP 3738978A JP 3738978 A JP3738978 A JP 3738978A JP S54129396 A JPS54129396 A JP S54129396A
Authority
JP
Japan
Prior art keywords
piezoothin
producing
film
producing piezoothin
piezoothin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3738978A
Other languages
Japanese (ja)
Inventor
Mitsuo Sakakura
Tetsuo Takaku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP3738978A priority Critical patent/JPS54129396A/en
Publication of JPS54129396A publication Critical patent/JPS54129396A/en
Pending legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP3738978A 1978-03-30 1978-03-30 Method of producing piezoothin film Pending JPS54129396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3738978A JPS54129396A (en) 1978-03-30 1978-03-30 Method of producing piezoothin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3738978A JPS54129396A (en) 1978-03-30 1978-03-30 Method of producing piezoothin film

Publications (1)

Publication Number Publication Date
JPS54129396A true JPS54129396A (en) 1979-10-06

Family

ID=12496164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3738978A Pending JPS54129396A (en) 1978-03-30 1978-03-30 Method of producing piezoothin film

Country Status (1)

Country Link
JP (1) JPS54129396A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63176466A (en) * 1987-01-12 1988-07-20 Toyobo Co Ltd Sputtering device
JPH01131029A (en) * 1987-11-13 1989-05-23 Nippon Telegr & Teleph Corp <Ntt> Manganese oxide amorphous substance, production thereof and cell

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63176466A (en) * 1987-01-12 1988-07-20 Toyobo Co Ltd Sputtering device
JPH01131029A (en) * 1987-11-13 1989-05-23 Nippon Telegr & Teleph Corp <Ntt> Manganese oxide amorphous substance, production thereof and cell

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