JPS54104885A - Pressure monitor and operation device for vacuum apparatus - Google Patents

Pressure monitor and operation device for vacuum apparatus

Info

Publication number
JPS54104885A
JPS54104885A JP1144478A JP1144478A JPS54104885A JP S54104885 A JPS54104885 A JP S54104885A JP 1144478 A JP1144478 A JP 1144478A JP 1144478 A JP1144478 A JP 1144478A JP S54104885 A JPS54104885 A JP S54104885A
Authority
JP
Japan
Prior art keywords
differential pressure
abnormal
pressure gauge
pressure
shut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1144478A
Other languages
Japanese (ja)
Other versions
JPS5822690B2 (en
Inventor
Katsumi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP53011444A priority Critical patent/JPS5822690B2/en
Publication of JPS54104885A publication Critical patent/JPS54104885A/en
Publication of JPS5822690B2 publication Critical patent/JPS5822690B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To isolate the abnormal protective unit and prevent propagation of accident by performing usual and emergency exhaust operations, by detecting an abnormal pressure location from output signals of pressure gauge and differential pressure gauge, and closing a shut-off valve.
CONSTITUTION: Differential pressure gauges 81, 82 are provided to detect the pressure difference between both ends of shut-off valves 12, 13 provided in pipings 61, 62 which connect protective units 1 to 3 containing a vacuum apparatus. When one differential pressure gauge detects presence of differential pressure, the presence or absence of differential pressure in the other differential pressure gauge is checked, thereby closing the shut-off valve 12 or 13 concerned, so that the abnormal protective unit may be isolated. Besides, the constitution includes an emergency exhaust device 30 which exhausts in case one of the protective units 1 to 3 becomes abnormal, a usual exhaust device 20 which exhausts usually and pressure gauges 71, 72, 73 which detect the internal pressure in eac protective unit, so that either exhaust device 20 or 23 is operated depending on the state of differential pressure gauge before and after the protective unit and the state of the pressure gauges.
COPYRIGHT: (C)1979,JPO&Japio
JP53011444A 1978-02-06 1978-02-06 Pressure monitoring and operating device for vacuum equipment Expired JPS5822690B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53011444A JPS5822690B2 (en) 1978-02-06 1978-02-06 Pressure monitoring and operating device for vacuum equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53011444A JPS5822690B2 (en) 1978-02-06 1978-02-06 Pressure monitoring and operating device for vacuum equipment

Publications (2)

Publication Number Publication Date
JPS54104885A true JPS54104885A (en) 1979-08-17
JPS5822690B2 JPS5822690B2 (en) 1983-05-10

Family

ID=11778255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53011444A Expired JPS5822690B2 (en) 1978-02-06 1978-02-06 Pressure monitoring and operating device for vacuum equipment

Country Status (1)

Country Link
JP (1) JPS5822690B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02289184A (en) * 1989-04-26 1990-11-29 Unitika Ltd Deodorizing textile product
JPH02289185A (en) * 1989-04-26 1990-11-29 Unitika Ltd Production of deodorizing textile product

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299877A (en) * 1976-02-18 1977-08-22 Nippon Kokan Kk Detector for damage and leakage of pipeline

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299877A (en) * 1976-02-18 1977-08-22 Nippon Kokan Kk Detector for damage and leakage of pipeline

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02289184A (en) * 1989-04-26 1990-11-29 Unitika Ltd Deodorizing textile product
JPH02289185A (en) * 1989-04-26 1990-11-29 Unitika Ltd Production of deodorizing textile product

Also Published As

Publication number Publication date
JPS5822690B2 (en) 1983-05-10

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