JPS54104885A - Pressure monitor and operation device for vacuum apparatus - Google Patents
Pressure monitor and operation device for vacuum apparatusInfo
- Publication number
- JPS54104885A JPS54104885A JP1144478A JP1144478A JPS54104885A JP S54104885 A JPS54104885 A JP S54104885A JP 1144478 A JP1144478 A JP 1144478A JP 1144478 A JP1144478 A JP 1144478A JP S54104885 A JPS54104885 A JP S54104885A
- Authority
- JP
- Japan
- Prior art keywords
- differential pressure
- abnormal
- pressure gauge
- pressure
- shut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
- Examining Or Testing Airtightness (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To isolate the abnormal protective unit and prevent propagation of accident by performing usual and emergency exhaust operations, by detecting an abnormal pressure location from output signals of pressure gauge and differential pressure gauge, and closing a shut-off valve.
CONSTITUTION: Differential pressure gauges 81, 82 are provided to detect the pressure difference between both ends of shut-off valves 12, 13 provided in pipings 61, 62 which connect protective units 1 to 3 containing a vacuum apparatus. When one differential pressure gauge detects presence of differential pressure, the presence or absence of differential pressure in the other differential pressure gauge is checked, thereby closing the shut-off valve 12 or 13 concerned, so that the abnormal protective unit may be isolated. Besides, the constitution includes an emergency exhaust device 30 which exhausts in case one of the protective units 1 to 3 becomes abnormal, a usual exhaust device 20 which exhausts usually and pressure gauges 71, 72, 73 which detect the internal pressure in eac protective unit, so that either exhaust device 20 or 23 is operated depending on the state of differential pressure gauge before and after the protective unit and the state of the pressure gauges.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53011444A JPS5822690B2 (en) | 1978-02-06 | 1978-02-06 | Pressure monitoring and operating device for vacuum equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53011444A JPS5822690B2 (en) | 1978-02-06 | 1978-02-06 | Pressure monitoring and operating device for vacuum equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54104885A true JPS54104885A (en) | 1979-08-17 |
JPS5822690B2 JPS5822690B2 (en) | 1983-05-10 |
Family
ID=11778255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53011444A Expired JPS5822690B2 (en) | 1978-02-06 | 1978-02-06 | Pressure monitoring and operating device for vacuum equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5822690B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02289184A (en) * | 1989-04-26 | 1990-11-29 | Unitika Ltd | Deodorizing textile product |
JPH02289185A (en) * | 1989-04-26 | 1990-11-29 | Unitika Ltd | Production of deodorizing textile product |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5299877A (en) * | 1976-02-18 | 1977-08-22 | Nippon Kokan Kk | Detector for damage and leakage of pipeline |
-
1978
- 1978-02-06 JP JP53011444A patent/JPS5822690B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5299877A (en) * | 1976-02-18 | 1977-08-22 | Nippon Kokan Kk | Detector for damage and leakage of pipeline |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02289184A (en) * | 1989-04-26 | 1990-11-29 | Unitika Ltd | Deodorizing textile product |
JPH02289185A (en) * | 1989-04-26 | 1990-11-29 | Unitika Ltd | Production of deodorizing textile product |
Also Published As
Publication number | Publication date |
---|---|
JPS5822690B2 (en) | 1983-05-10 |
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