JPS54100688A - Crystal vibrator - Google Patents
Crystal vibratorInfo
- Publication number
- JPS54100688A JPS54100688A JP686478A JP686478A JPS54100688A JP S54100688 A JPS54100688 A JP S54100688A JP 686478 A JP686478 A JP 686478A JP 686478 A JP686478 A JP 686478A JP S54100688 A JPS54100688 A JP S54100688A
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- crystal
- bending vibration
- axis
- electric fields
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To improve frequency/temperature characteristics of on bending vibration by combining two bending vibrations whose displacement directions intersect mutually, in a crystal vibrator of a relatively-low resonance frequency making use of bending vibrations. CONSTITUTION:To obtain the crystal vibrator, plate Z is turned counterclockwise on axis X by (phi) and then turned counterclockwise to axis Z on axis Y' by angle theta before being cut from an original crystal. This vibrator 61 is provided with upper and lower electrodes 62 to 65 divided, and electric fields are applied into vibrator 61 in directions of arrows 66 to 69. Further, a bending vibration inside of surface X'Y' is excited by electric fields 66 and 67 in mutually-opposite directions, and a Y'Z' bending vibration is excited by electric fields 68 and 69. Combining two vibrations improves resonance-frequency/temperature characteristics of one bending vibration. Further, a crystal plate cut at angles of (phi) and (theta) is polished to a thickness of 500mu and less and then the photo lithography manufacturing method is employed, thereby making it possible to mass-produce this vibrator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP686478A JPS54100688A (en) | 1978-01-25 | 1978-01-25 | Crystal vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP686478A JPS54100688A (en) | 1978-01-25 | 1978-01-25 | Crystal vibrator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54100688A true JPS54100688A (en) | 1979-08-08 |
Family
ID=11650098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP686478A Pending JPS54100688A (en) | 1978-01-25 | 1978-01-25 | Crystal vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54100688A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0676531A (en) * | 1990-01-29 | 1994-03-18 | Shape Inc | Tape cassette and reel lock thereof |
-
1978
- 1978-01-25 JP JP686478A patent/JPS54100688A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0676531A (en) * | 1990-01-29 | 1994-03-18 | Shape Inc | Tape cassette and reel lock thereof |
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