JPS5384566A - Partial and sequential exposure method - Google Patents

Partial and sequential exposure method

Info

Publication number
JPS5384566A
JPS5384566A JP16062376A JP16062376A JPS5384566A JP S5384566 A JPS5384566 A JP S5384566A JP 16062376 A JP16062376 A JP 16062376A JP 16062376 A JP16062376 A JP 16062376A JP S5384566 A JPS5384566 A JP S5384566A
Authority
JP
Japan
Prior art keywords
partial
exposure method
sequential exposure
sequential
axes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16062376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5414472B2 (enExample
Inventor
Masao Hiyane
Takanao Shiratori
Toa Hayasaka
Misao Sekimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
NTT Inc
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP16062376A priority Critical patent/JPS5384566A/ja
Publication of JPS5384566A publication Critical patent/JPS5384566A/ja
Publication of JPS5414472B2 publication Critical patent/JPS5414472B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16062376A 1976-12-29 1976-12-29 Partial and sequential exposure method Granted JPS5384566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16062376A JPS5384566A (en) 1976-12-29 1976-12-29 Partial and sequential exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16062376A JPS5384566A (en) 1976-12-29 1976-12-29 Partial and sequential exposure method

Publications (2)

Publication Number Publication Date
JPS5384566A true JPS5384566A (en) 1978-07-26
JPS5414472B2 JPS5414472B2 (enExample) 1979-06-07

Family

ID=15718925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16062376A Granted JPS5384566A (en) 1976-12-29 1976-12-29 Partial and sequential exposure method

Country Status (1)

Country Link
JP (1) JPS5384566A (enExample)

Also Published As

Publication number Publication date
JPS5414472B2 (enExample) 1979-06-07

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