JPS5381082A - Controlling method for holding extreme valies - Google Patents

Controlling method for holding extreme valies

Info

Publication number
JPS5381082A
JPS5381082A JP15837276A JP15837276A JPS5381082A JP S5381082 A JPS5381082 A JP S5381082A JP 15837276 A JP15837276 A JP 15837276A JP 15837276 A JP15837276 A JP 15837276A JP S5381082 A JPS5381082 A JP S5381082A
Authority
JP
Japan
Prior art keywords
valies
controlling method
values
extreme
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15837276A
Other languages
Japanese (ja)
Inventor
Masao Hiyane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15837276A priority Critical patent/JPS5381082A/en
Publication of JPS5381082A publication Critical patent/JPS5381082A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To reduce errors based on noises and make accurate automatic alignment of a mask used for an exposure apparatus and the object by performing alignment with a light source and a photo detector and using the digital values AD converted from time differentiated values as position detecting values.
COPYRIGHT: (C)1978,JPO&Japio
JP15837276A 1976-12-27 1976-12-27 Controlling method for holding extreme valies Pending JPS5381082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15837276A JPS5381082A (en) 1976-12-27 1976-12-27 Controlling method for holding extreme valies

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15837276A JPS5381082A (en) 1976-12-27 1976-12-27 Controlling method for holding extreme valies

Publications (1)

Publication Number Publication Date
JPS5381082A true JPS5381082A (en) 1978-07-18

Family

ID=15670249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15837276A Pending JPS5381082A (en) 1976-12-27 1976-12-27 Controlling method for holding extreme valies

Country Status (1)

Country Link
JP (1) JPS5381082A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831526A (en) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> Alignment device of printing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831526A (en) * 1981-08-19 1983-02-24 Nippon Kogaku Kk <Nikon> Alignment device of printing equipment
JPH0341972B2 (en) * 1981-08-19 1991-06-25

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