JPS5376756A - Production of photo mask - Google Patents

Production of photo mask

Info

Publication number
JPS5376756A
JPS5376756A JP15204476A JP15204476A JPS5376756A JP S5376756 A JPS5376756 A JP S5376756A JP 15204476 A JP15204476 A JP 15204476A JP 15204476 A JP15204476 A JP 15204476A JP S5376756 A JPS5376756 A JP S5376756A
Authority
JP
Japan
Prior art keywords
photo mask
production
defects
averting
flaws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15204476A
Other languages
Japanese (ja)
Inventor
Kazuaki Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP15204476A priority Critical patent/JPS5376756A/en
Publication of JPS5376756A publication Critical patent/JPS5376756A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To make a photo mask by averting the appearance of defects even if original plates having stains, flaws and other defects are used.
COPYRIGHT: (C)1978,JPO&Japio
JP15204476A 1976-12-20 1976-12-20 Production of photo mask Pending JPS5376756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15204476A JPS5376756A (en) 1976-12-20 1976-12-20 Production of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15204476A JPS5376756A (en) 1976-12-20 1976-12-20 Production of photo mask

Publications (1)

Publication Number Publication Date
JPS5376756A true JPS5376756A (en) 1978-07-07

Family

ID=15531820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15204476A Pending JPS5376756A (en) 1976-12-20 1976-12-20 Production of photo mask

Country Status (1)

Country Link
JP (1) JPS5376756A (en)

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