JPS537585A - Spattering apparatus of horizontalltype discharge with cross magnetic field - Google Patents
Spattering apparatus of horizontalltype discharge with cross magnetic fieldInfo
- Publication number
- JPS537585A JPS537585A JP8220976A JP8220976A JPS537585A JP S537585 A JPS537585 A JP S537585A JP 8220976 A JP8220976 A JP 8220976A JP 8220976 A JP8220976 A JP 8220976A JP S537585 A JPS537585 A JP S537585A
- Authority
- JP
- Japan
- Prior art keywords
- horizontalltype
- discharge
- magnetic field
- cross magnetic
- spattering apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8220976A JPS537585A (en) | 1976-07-10 | 1976-07-10 | Spattering apparatus of horizontalltype discharge with cross magnetic field |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8220976A JPS537585A (en) | 1976-07-10 | 1976-07-10 | Spattering apparatus of horizontalltype discharge with cross magnetic field |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS537585A true JPS537585A (en) | 1978-01-24 |
Family
ID=13768023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8220976A Pending JPS537585A (en) | 1976-07-10 | 1976-07-10 | Spattering apparatus of horizontalltype discharge with cross magnetic field |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS537585A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047394A (en) * | 1989-09-12 | 1991-09-10 | University Of Houston System | Sputtering method |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS473154U (en) * | 1971-01-29 | 1972-09-02 | ||
JPS4825401U (en) * | 1971-08-02 | 1973-03-26 | ||
JPS4942663U (en) * | 1972-07-19 | 1974-04-15 | ||
JPS5061382A (en) * | 1973-10-02 | 1975-05-26 | ||
JPS50160181A (en) * | 1974-06-20 | 1975-12-25 |
-
1976
- 1976-07-10 JP JP8220976A patent/JPS537585A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS473154U (en) * | 1971-01-29 | 1972-09-02 | ||
JPS4825401U (en) * | 1971-08-02 | 1973-03-26 | ||
JPS4942663U (en) * | 1972-07-19 | 1974-04-15 | ||
JPS5061382A (en) * | 1973-10-02 | 1975-05-26 | ||
JPS50160181A (en) * | 1974-06-20 | 1975-12-25 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047394A (en) * | 1989-09-12 | 1991-09-10 | University Of Houston System | Sputtering method |
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