JPS473154U - - Google Patents
Info
- Publication number
- JPS473154U JPS473154U JP408071U JP408071U JPS473154U JP S473154 U JPS473154 U JP S473154U JP 408071 U JP408071 U JP 408071U JP 408071 U JP408071 U JP 408071U JP S473154 U JPS473154 U JP S473154U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP408071U JPS473154U (en) | 1971-01-29 | 1971-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP408071U JPS473154U (en) | 1971-01-29 | 1971-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS473154U true JPS473154U (en) | 1972-09-02 |
Family
ID=27844610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP408071U Pending JPS473154U (en) | 1971-01-29 | 1971-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS473154U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5189835A (en) * | 1975-02-04 | 1976-08-06 | KINZOKUNOHO DENMETSUKIHOHO | |
| JPS52150790A (en) * | 1976-06-10 | 1977-12-14 | Univ Sydney | Process and apparatus for reactionary vacuum evaporation |
| JPS52156185A (en) * | 1976-06-21 | 1977-12-26 | Makoto Katsurai | Horizontalltype discharge apparatus with cross magnetic field |
| JPS537585A (en) * | 1976-07-10 | 1978-01-24 | Makoto Katsurai | Spattering apparatus of horizontalltype discharge with cross magnetic field |
| JPS53114787A (en) * | 1977-03-18 | 1978-10-06 | Ulvac Corp | Target for high profitable sputtering apparatus |
-
1971
- 1971-01-29 JP JP408071U patent/JPS473154U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5189835A (en) * | 1975-02-04 | 1976-08-06 | KINZOKUNOHO DENMETSUKIHOHO | |
| JPS52150790A (en) * | 1976-06-10 | 1977-12-14 | Univ Sydney | Process and apparatus for reactionary vacuum evaporation |
| JPS572272B2 (en) * | 1976-06-10 | 1982-01-14 | ||
| JPS52156185A (en) * | 1976-06-21 | 1977-12-26 | Makoto Katsurai | Horizontalltype discharge apparatus with cross magnetic field |
| JPS5734348B2 (en) * | 1976-06-21 | 1982-07-22 | ||
| JPS537585A (en) * | 1976-07-10 | 1978-01-24 | Makoto Katsurai | Spattering apparatus of horizontalltype discharge with cross magnetic field |
| JPS53114787A (en) * | 1977-03-18 | 1978-10-06 | Ulvac Corp | Target for high profitable sputtering apparatus |
| JPS579430B2 (en) * | 1977-03-18 | 1982-02-22 |