JPS5373078A - Fine adjustment mechanism of electromagnetic driving type - Google Patents

Fine adjustment mechanism of electromagnetic driving type

Info

Publication number
JPS5373078A
JPS5373078A JP14954476A JP14954476A JPS5373078A JP S5373078 A JPS5373078 A JP S5373078A JP 14954476 A JP14954476 A JP 14954476A JP 14954476 A JP14954476 A JP 14954476A JP S5373078 A JPS5373078 A JP S5373078A
Authority
JP
Japan
Prior art keywords
fine adjustment
adjustment mechanism
driving type
electromagnetic driving
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14954476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5538048B2 (en:Method
Inventor
Naoji Otsuka
Tadao Saito
Hideo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14954476A priority Critical patent/JPS5373078A/ja
Publication of JPS5373078A publication Critical patent/JPS5373078A/ja
Publication of JPS5538048B2 publication Critical patent/JPS5538048B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP14954476A 1976-12-13 1976-12-13 Fine adjustment mechanism of electromagnetic driving type Granted JPS5373078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14954476A JPS5373078A (en) 1976-12-13 1976-12-13 Fine adjustment mechanism of electromagnetic driving type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14954476A JPS5373078A (en) 1976-12-13 1976-12-13 Fine adjustment mechanism of electromagnetic driving type

Publications (2)

Publication Number Publication Date
JPS5373078A true JPS5373078A (en) 1978-06-29
JPS5538048B2 JPS5538048B2 (en:Method) 1980-10-02

Family

ID=15477458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14954476A Granted JPS5373078A (en) 1976-12-13 1976-12-13 Fine adjustment mechanism of electromagnetic driving type

Country Status (1)

Country Link
JP (1) JPS5373078A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830128A (ja) * 1981-08-17 1983-02-22 Hitachi Ltd ウエハのチヤツク装置
JPS6190432A (ja) * 1984-10-11 1986-05-08 Nippon Telegr & Teleph Corp <Ntt> あおり支持機構
CN110941081A (zh) * 2019-12-13 2020-03-31 南通大学 一种磁悬浮式载物台及其控制方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830128A (ja) * 1981-08-17 1983-02-22 Hitachi Ltd ウエハのチヤツク装置
JPS6190432A (ja) * 1984-10-11 1986-05-08 Nippon Telegr & Teleph Corp <Ntt> あおり支持機構
CN110941081A (zh) * 2019-12-13 2020-03-31 南通大学 一种磁悬浮式载物台及其控制方法
CN110941081B (zh) * 2019-12-13 2021-07-30 南通大学 一种磁悬浮式载物台及其控制方法

Also Published As

Publication number Publication date
JPS5538048B2 (en:Method) 1980-10-02

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