JPS5538048B2 - - Google Patents
Info
- Publication number
- JPS5538048B2 JPS5538048B2 JP14954476A JP14954476A JPS5538048B2 JP S5538048 B2 JPS5538048 B2 JP S5538048B2 JP 14954476 A JP14954476 A JP 14954476A JP 14954476 A JP14954476 A JP 14954476A JP S5538048 B2 JPS5538048 B2 JP S5538048B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14954476A JPS5373078A (en) | 1976-12-13 | 1976-12-13 | Fine adjustment mechanism of electromagnetic driving type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14954476A JPS5373078A (en) | 1976-12-13 | 1976-12-13 | Fine adjustment mechanism of electromagnetic driving type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5373078A JPS5373078A (en) | 1978-06-29 |
| JPS5538048B2 true JPS5538048B2 (en:Method) | 1980-10-02 |
Family
ID=15477458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14954476A Granted JPS5373078A (en) | 1976-12-13 | 1976-12-13 | Fine adjustment mechanism of electromagnetic driving type |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5373078A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830128A (ja) * | 1981-08-17 | 1983-02-22 | Hitachi Ltd | ウエハのチヤツク装置 |
| JPS6190432A (ja) * | 1984-10-11 | 1986-05-08 | Nippon Telegr & Teleph Corp <Ntt> | あおり支持機構 |
| CN110941081B (zh) * | 2019-12-13 | 2021-07-30 | 南通大学 | 一种磁悬浮式载物台及其控制方法 |
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1976
- 1976-12-13 JP JP14954476A patent/JPS5373078A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5373078A (en) | 1978-06-29 |