JPS5362582U - - Google Patents
Info
- Publication number
- JPS5362582U JPS5362582U JP14349676U JP14349676U JPS5362582U JP S5362582 U JPS5362582 U JP S5362582U JP 14349676 U JP14349676 U JP 14349676U JP 14349676 U JP14349676 U JP 14349676U JP S5362582 U JPS5362582 U JP S5362582U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976143496U JPS6014003Y2 (ja) | 1976-10-27 | 1976-10-27 | 流量圧力制御弁付シリンダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976143496U JPS6014003Y2 (ja) | 1976-10-27 | 1976-10-27 | 流量圧力制御弁付シリンダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362582U true JPS5362582U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-05-26 |
| JPS6014003Y2 JPS6014003Y2 (ja) | 1985-05-04 |
Family
ID=28752188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976143496U Expired JPS6014003Y2 (ja) | 1976-10-27 | 1976-10-27 | 流量圧力制御弁付シリンダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6014003Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60143205A (ja) * | 1983-12-29 | 1985-07-29 | Koganei Seisakusho:Kk | シリンダ |
| WO2019009107A1 (ja) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | アクチュエータ、バルブ、および半導体製造装置 |
| WO2019009106A1 (ja) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4329529Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1966-04-07 | 1968-12-04 | ||
| JPS5015114U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-06-04 | 1975-02-18 | ||
| JPS5043672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-08-23 | 1975-05-02 |
-
1976
- 1976-10-27 JP JP1976143496U patent/JPS6014003Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4329529Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1966-04-07 | 1968-12-04 | ||
| JPS5015114U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-06-04 | 1975-02-18 | ||
| JPS5043672U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-08-23 | 1975-05-02 |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60143205A (ja) * | 1983-12-29 | 1985-07-29 | Koganei Seisakusho:Kk | シリンダ |
| WO2019009107A1 (ja) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | アクチュエータ、バルブ、および半導体製造装置 |
| WO2019009106A1 (ja) * | 2017-07-04 | 2019-01-10 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
| TWI679367B (zh) * | 2017-07-04 | 2019-12-11 | 日商富士金股份有限公司 | 致動器、閥，以及半導體製造裝置 |
| CN110730870A (zh) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | 致动器、阀、以及半导体制造装置 |
| CN110730869A (zh) * | 2017-07-04 | 2020-01-24 | 株式会社富士金 | 致动器、阀、流体供给系统、以及半导体制造装置 |
| KR20200014812A (ko) * | 2017-07-04 | 2020-02-11 | 가부시키가이샤 후지킨 | 액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치 |
| JPWO2019009106A1 (ja) * | 2017-07-04 | 2020-04-30 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
| JPWO2019009107A1 (ja) * | 2017-07-04 | 2020-04-30 | 株式会社フジキン | アクチュエータ、バルブ、および半導体製造装置 |
| US11047503B2 (en) | 2017-07-04 | 2021-06-29 | Fujikin Incorporation | Actuator, valve device, and fluid supply system |
| CN110730870B (zh) * | 2017-07-04 | 2021-07-30 | 株式会社富士金 | 致动器、阀、以及半导体制造装置 |
| US11261990B2 (en) | 2017-07-04 | 2022-03-01 | Fujikin Incorporated | Actuator and valve device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6014003Y2 (ja) | 1985-05-04 |