JPWO2019009107A1 - アクチュエータ、バルブ、および半導体製造装置 - Google Patents
アクチュエータ、バルブ、および半導体製造装置 Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/028—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force
- F15B11/036—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force by means of servomotors having a plurality of working chambers
- F15B11/0365—Tandem constructions
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/04—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
- F15B11/05—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed specially adapted to maintain constant speed, e.g. pressure-compensated, load-responsive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
- F15B15/1447—Pistons; Piston to piston rod assemblies
- F15B15/1452—Piston sealings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/025—Pressure reducing valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/204—Control means for piston speed or actuating force without external control, e.g. control valve inside the piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/705—Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
- F15B2211/7051—Linear output members
- F15B2211/7052—Single-acting output members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
- F15B2211/705—Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
- F15B2211/7051—Linear output members
- F15B2211/7055—Linear output members having more than two chambers
- F15B2211/7056—Tandem cylinders
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Abstract
Description
図3に示すように、ボディ10は、ボディ本体11と、シート12と、ボンネット13と、止め輪14と、ダイヤフラム15と、押えアダプタ16と、ダイヤフラム押え17とを備える。
アクチュエータ20は、全体で略円柱形状をなし、下ケーシング21と、仕切ディスク22と、サポートディスク23と、中ケーシング24と、上ケーシング25と、ステム26と、圧縮コイルスプリング27と、断面円形の第2〜第6Oリング28A〜28Eと、4本のボルト29(図2参照)と、駆動部30と、減圧弁40と、リフト量調整機構50と、を有する。なお、下ケーシング21と、仕切ディスク22と、サポートディスク23と、中ケーシング24と、上ケーシング25とにより、アクチュエータ20のケーシングが構成される。
駆動部30は、第1ピストン31と、第7Oリング32と、第1シール部材33と、第2ピストン34と、第8Oリング35と、第2シール部材36と、止め輪37、38とを有する。
減圧弁40は、中ケーシング24に設けられ、ポペット部41と、減圧部42とを備える。
図3に示すように、リフト量調整機構50は、ロックナット51と、調整ネジ52と、調整コマ53とを有する。
次に、本実施形態に係る流体供給システム2について図6を参照して説明する。
次に、本実施形態に係る流体供給システム2におけるバルブ1の開閉動作について、図3、4、6、7を参照して説明する。なお、本実施形態の圧力条件として、アキュムレータ3からバルブ1へ供給される駆動流体の圧力を0.5MPaとし、減圧室R2を経て第1、2圧力室S1、S2に供給される駆動流体の圧力を0.35MPaとする。
次に、上記で説明したバルブ1および流体供給システム2が使用される半導体製造装置100について説明する。
11:ボディ本体、11b:流体流入路、11c:流体流出路、15:ダイヤフラム、20:アクチュエータ、21:下ケーシング、22:仕切ディスク、22g:第1外周部収容溝、23:サポートディスク、23g:第2外周部収容溝、24:中ケーシング、24e:第1挿入孔、24f:第2挿入孔、24g:駆動流体通過孔、24I:周縁部、24P、24Q:雌ねじ部、25:上ケーシング、25d:駆動流体導入孔、26:ステム、30:駆動部、31:第1ピストン、31c:第1内周部収容溝、33:第1シール部材、33A:第1内周部、33B:第1外周部、33C:第1中間部、34:第2ピストン、34c:第2内周部収容溝、36:第2シール部材、36A:第2内周部、36B:第2外周部、36C:第2中間部、40:減圧弁、41:ポペット部、41A、42A:止めネジ、42:減圧部、43:ポペット栓、44:ポペット、44A:ポペット本体と、44B:ロッド、45:ポペットスプリング、46:スプリング押え、47:減圧ピストン、48減圧スプリング、49:逆止弁、100:半導体製造装置、S1:第1圧力室、S2:第2圧力室、R1:流入室、R2:減圧室
Claims (6)
- 第1環状溝が内周部に形成されたケーシングと、
第2環状溝が外周部に形成され、前記ケーシング内に設けられて前記ケーシングとともに圧力室を形成し、外部からの駆動流体により駆動されるピストンと、
前記第1環状溝にはめ込まれる第1嵌合部と前記第2環状溝にはめ込まれる第2嵌合部とを有し、前記圧力室を密閉する環状のシール部材と、を備える、アクチュエータ。 - 前記シール部材の第2嵌合部は、前記シール部材の第1嵌合部に対する前記シール部材の軸方向へ沿う移動可能な最大距離が、前記シール部材の厚さの半分以下である所定の距離となるように制限されている、請求項1に記載のアクチュエータ。
- 前記シール部材は、前記第1嵌合部と前記第2嵌合部との間に位置し、前記第1嵌合部および前記第2嵌合部の厚さより薄く構成された中間部を有する、請求項1または請求項2に記載のアクチュエータ。
- 流体通路が形成されたボディと、
前記流体通路を開閉する弁体と、
第1環状溝が内周部に形成されたケーシングと、第2環状溝が外周部に形成され、前記ケーシング内に設けられて前記ケーシングとともに圧力室を形成し、外部からの駆動流体により駆動されるピストンと、前記第1環状溝にはめ込まれる第1嵌合部と前記第2環状溝にはめ込まれる第2嵌合部とを有し、前記圧力室を密閉する環状のシール部材と、を備える、アクチュエータと、
前記ピストンの駆動により、前記流体通路を開閉させるために前記ボディに対し近接および離間可能に設けられたステムと、を備えるバルブ。 - 請求項4に記載のバルブを備える半導体製造装置。
- 第1環状溝が内周部に形成されたケーシングと、
前記ケーシング内に設けられ、外部から供給される駆動流体の圧力を所定の圧力に減圧する減圧弁と、
第2環状溝が外周部に形成され、前記ケーシング内に設けられて前記ケーシングとともに圧力室を形成し、減圧された前記所定の圧力の駆動流体により駆動されるピストンと、
前記第1環状溝にはめ込まれる第1嵌合部と前記第2環状溝にはめ込まれる第2嵌合部とを有し、前記圧力室を密閉する環状のシール部材と、を備える、アクチュエータ。
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JP2017131485 | 2017-07-04 | ||
JP2017131485 | 2017-07-04 | ||
PCT/JP2018/023883 WO2019009107A1 (ja) | 2017-07-04 | 2018-06-22 | アクチュエータ、バルブ、および半導体製造装置 |
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JPWO2019009107A1 true JPWO2019009107A1 (ja) | 2020-04-30 |
JP7148990B2 JP7148990B2 (ja) | 2022-10-06 |
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US (1) | US11261990B2 (ja) |
JP (1) | JP7148990B2 (ja) |
KR (1) | KR102278983B1 (ja) |
CN (1) | CN110730870B (ja) |
TW (1) | TWI679367B (ja) |
WO (1) | WO2019009107A1 (ja) |
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JP7365033B2 (ja) * | 2019-04-26 | 2023-10-19 | 株式会社フジキン | バルブ装置 |
CN116057662A (zh) * | 2020-08-14 | 2023-05-02 | Asml荷兰有限公司 | 致动器装置和电子光学柱 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5362582U (ja) * | 1976-10-27 | 1978-05-26 | ||
US20070120080A1 (en) * | 2004-05-13 | 2007-05-31 | Fujikin Incorporated | Controller |
JP2008106899A (ja) * | 2006-10-27 | 2008-05-08 | Toyota Industries Corp | ダイヤフラム式アクチュエータ |
JP2012026577A (ja) * | 2011-09-22 | 2012-02-09 | Fujikin Inc | ダイレクトタッチ型メタルダイヤフラム弁のバルブストローク調整方法 |
JP2016050641A (ja) * | 2014-09-01 | 2016-04-11 | 株式会社鷺宮製作所 | 駆動軸へのダイヤフラムの固定構造及び電磁式制御弁 |
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CN2454588Y (zh) * | 2000-12-15 | 2001-10-17 | 武汉大禹阀门制造有限公司 | 双腔隔膜式排泥阀 |
JP4622802B2 (ja) * | 2005-02-10 | 2011-02-02 | 株式会社アドヴィックス | ピストンポンプ |
JP5054904B2 (ja) * | 2005-08-30 | 2012-10-24 | 株式会社フジキン | ダイレクトタッチ型メタルダイヤフラム弁 |
CN100462605C (zh) * | 2007-02-13 | 2009-02-18 | 万若(北京)环境工程技术有限公司 | 用于污水输送的膜片式负压阀 |
JP5597468B2 (ja) * | 2010-07-27 | 2014-10-01 | 株式会社フジキン | エアオペレートバルブ |
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2018
- 2018-06-22 WO PCT/JP2018/023883 patent/WO2019009107A1/ja active Application Filing
- 2018-06-22 JP JP2019527636A patent/JP7148990B2/ja active Active
- 2018-06-22 KR KR1020197038315A patent/KR102278983B1/ko active IP Right Grant
- 2018-06-22 CN CN201880037585.0A patent/CN110730870B/zh not_active Expired - Fee Related
- 2018-06-29 TW TW107122435A patent/TWI679367B/zh active
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2020
- 2020-01-03 US US16/733,743 patent/US11261990B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5362582U (ja) * | 1976-10-27 | 1978-05-26 | ||
US20070120080A1 (en) * | 2004-05-13 | 2007-05-31 | Fujikin Incorporated | Controller |
JP2008106899A (ja) * | 2006-10-27 | 2008-05-08 | Toyota Industries Corp | ダイヤフラム式アクチュエータ |
JP2012026577A (ja) * | 2011-09-22 | 2012-02-09 | Fujikin Inc | ダイレクトタッチ型メタルダイヤフラム弁のバルブストローク調整方法 |
JP2016050641A (ja) * | 2014-09-01 | 2016-04-11 | 株式会社鷺宮製作所 | 駆動軸へのダイヤフラムの固定構造及び電磁式制御弁 |
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JP7148990B2 (ja) | 2022-10-06 |
US20200149653A1 (en) | 2020-05-14 |
KR20200008167A (ko) | 2020-01-23 |
TWI679367B (zh) | 2019-12-11 |
CN110730870B (zh) | 2021-07-30 |
WO2019009107A1 (ja) | 2019-01-10 |
US11261990B2 (en) | 2022-03-01 |
TW201907108A (zh) | 2019-02-16 |
CN110730870A (zh) | 2020-01-24 |
KR102278983B1 (ko) | 2021-07-16 |
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