JPS5358810A - High vacuum pump - Google Patents

High vacuum pump

Info

Publication number
JPS5358810A
JPS5358810A JP13395176A JP13395176A JPS5358810A JP S5358810 A JPS5358810 A JP S5358810A JP 13395176 A JP13395176 A JP 13395176A JP 13395176 A JP13395176 A JP 13395176A JP S5358810 A JPS5358810 A JP S5358810A
Authority
JP
Japan
Prior art keywords
high vacuum
vacuum pump
pump
torr
constituted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13395176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6137474B2 (enExample
Inventor
Kazuaki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP13395176A priority Critical patent/JPS5358810A/ja
Publication of JPS5358810A publication Critical patent/JPS5358810A/ja
Publication of JPS6137474B2 publication Critical patent/JPS6137474B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP13395176A 1976-11-08 1976-11-08 High vacuum pump Granted JPS5358810A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13395176A JPS5358810A (en) 1976-11-08 1976-11-08 High vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13395176A JPS5358810A (en) 1976-11-08 1976-11-08 High vacuum pump

Publications (2)

Publication Number Publication Date
JPS5358810A true JPS5358810A (en) 1978-05-27
JPS6137474B2 JPS6137474B2 (enExample) 1986-08-23

Family

ID=15116876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13395176A Granted JPS5358810A (en) 1976-11-08 1976-11-08 High vacuum pump

Country Status (1)

Country Link
JP (1) JPS5358810A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238898A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS6238899A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS6238897A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPH01124396U (enExample) * 1988-02-17 1989-08-24

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238898A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS6238899A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS6238897A (ja) * 1985-08-14 1987-02-19 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPH01124396U (enExample) * 1988-02-17 1989-08-24

Also Published As

Publication number Publication date
JPS6137474B2 (enExample) 1986-08-23

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