JPS5355977A - Rotary type chemical evaporation thin film formation device - Google Patents

Rotary type chemical evaporation thin film formation device

Info

Publication number
JPS5355977A
JPS5355977A JP13043676A JP13043676A JPS5355977A JP S5355977 A JPS5355977 A JP S5355977A JP 13043676 A JP13043676 A JP 13043676A JP 13043676 A JP13043676 A JP 13043676A JP S5355977 A JPS5355977 A JP S5355977A
Authority
JP
Japan
Prior art keywords
thin film
film formation
rotary type
formation device
type chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13043676A
Other languages
Japanese (ja)
Other versions
JPS6129138B2 (en
Inventor
Teruo Yoneyama
Yasuo Iizuka
Shinichi Yamamoto
Mitsusada Shibasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13043676A priority Critical patent/JPS5355977A/en
Publication of JPS5355977A publication Critical patent/JPS5355977A/en
Publication of JPS6129138B2 publication Critical patent/JPS6129138B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:No pattern is provided on one of plural units of substrate installed on the table surface which is rotating within a bell-jar, and the light sent from a laser beam source located outside the bell-jar is reflected on the substrate and received with a photo cell, and the film thickness is culculated based on the output of the photo cell, thuse securing a thin film of a uniform thickness.
JP13043676A 1976-11-01 1976-11-01 Rotary type chemical evaporation thin film formation device Granted JPS5355977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13043676A JPS5355977A (en) 1976-11-01 1976-11-01 Rotary type chemical evaporation thin film formation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13043676A JPS5355977A (en) 1976-11-01 1976-11-01 Rotary type chemical evaporation thin film formation device

Publications (2)

Publication Number Publication Date
JPS5355977A true JPS5355977A (en) 1978-05-20
JPS6129138B2 JPS6129138B2 (en) 1986-07-04

Family

ID=15034181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13043676A Granted JPS5355977A (en) 1976-11-01 1976-11-01 Rotary type chemical evaporation thin film formation device

Country Status (1)

Country Link
JP (1) JPS5355977A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665974A (en) * 1979-11-02 1981-06-04 Komatsu Ltd Vapor deposition controlling method
JP2015074821A (en) * 2013-10-11 2015-04-20 大陽日酸株式会社 Film thickness measurement method for vapor phase growth apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665974A (en) * 1979-11-02 1981-06-04 Komatsu Ltd Vapor deposition controlling method
JP2015074821A (en) * 2013-10-11 2015-04-20 大陽日酸株式会社 Film thickness measurement method for vapor phase growth apparatus

Also Published As

Publication number Publication date
JPS6129138B2 (en) 1986-07-04

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