JPS5348077B1 - - Google Patents

Info

Publication number
JPS5348077B1
JPS5348077B1 JP2885772A JP2885772A JPS5348077B1 JP S5348077 B1 JPS5348077 B1 JP S5348077B1 JP 2885772 A JP2885772 A JP 2885772A JP 2885772 A JP2885772 A JP 2885772A JP S5348077 B1 JPS5348077 B1 JP S5348077B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2885772A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5348077B1 publication Critical patent/JPS5348077B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G05D3/18—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses
    • G05D3/183—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses using stepping motor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/0014—Image feed-back for automatic industrial control, e.g. robot with camera
JP2885772A 1971-03-22 1972-03-22 Pending JPS5348077B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12659771A 1971-03-22 1971-03-22

Publications (1)

Publication Number Publication Date
JPS5348077B1 true JPS5348077B1 (ja) 1978-12-26

Family

ID=22425706

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2885772A Pending JPS5348077B1 (ja) 1971-03-22 1972-03-22
JP8285478A Pending JPS54133077A (en) 1971-03-22 1978-07-07 Device for automatically matching two superposed articles such as semiconductor wafer and transparent mask
JP1981160164U Pending JPS5794942U (ja) 1971-03-22 1981-10-27

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP8285478A Pending JPS54133077A (en) 1971-03-22 1978-07-07 Device for automatically matching two superposed articles such as semiconductor wafer and transparent mask
JP1981160164U Pending JPS5794942U (ja) 1971-03-22 1981-10-27

Country Status (5)

Country Link
US (1) US3683195A (ja)
JP (3) JPS5348077B1 (ja)
DE (2) DE2265346A1 (ja)
GB (1) GB1326178A (ja)
HK (1) HK69776A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178573U (ja) * 1987-05-11 1988-11-18
JP2009188404A (ja) * 2008-02-01 2009-08-20 Asml Netherlands Bv アラインメントマーク及びこのようなアラインメントマークを備える基板の位置合わせ方法

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3796497A (en) * 1971-12-01 1974-03-12 Ibm Optical alignment method and apparatus
US3943359A (en) * 1973-06-15 1976-03-09 Hitachi, Ltd. Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
DE2335227A1 (de) * 1973-07-11 1975-01-30 Leitz Ernst Gmbh Verfahren zur ausrichtung der winkellage eines werkstueckes mit optisch erfassbaren strukturen relativ zu einer bezugsrichtung sowie einrichtungen zu dessen durchfuehrung
US3890508A (en) * 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system
JPS607764B2 (ja) * 1976-04-28 1985-02-27 キヤノン株式会社 走査型光検出装置
US4097750A (en) * 1977-03-18 1978-06-27 General Motors Corporation Method of orienting objects using optically smeared images
DE2846316A1 (de) * 1978-10-24 1980-06-04 Siemens Ag Verfahren und vorrichtung zur automatischen ausrichtung von zwei aufeinander einzujustierenden objekten
US4977361A (en) * 1978-06-26 1990-12-11 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
US4687980A (en) * 1980-10-20 1987-08-18 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
DE2930979A1 (de) * 1979-07-31 1981-02-26 Optimetrix Corp Verfahren und vorrichtung zur zweidimensionalen positionierung eines werkstueckes
US4310743A (en) * 1979-09-24 1982-01-12 Hughes Aircraft Company Ion beam lithography process and apparatus using step-and-repeat exposure
EP0036026B1 (de) * 1980-03-10 1986-11-12 Eaton-Optimetrix Inc. Adressierbare Positioniervorrichtung
US4335313A (en) * 1980-05-12 1982-06-15 The Perkin-Elmer Corporation Method and apparatus for aligning an opaque mask with an integrated circuit wafer
US4357540A (en) * 1980-12-19 1982-11-02 International Business Machines Corporation Semiconductor device array mask inspection method and apparatus
US4397559A (en) * 1981-02-19 1983-08-09 University Of Pittsburgh Apparatus for processing electromagnetic radiation and method
JPS57183034A (en) * 1981-05-07 1982-11-11 Toshiba Corp Electron bean transfer device
JPS5882248A (ja) * 1981-11-12 1983-05-17 Canon Inc 自動整合装置
JPS5999721A (ja) * 1982-11-29 1984-06-08 Canon Inc マーク検出装置
JPS59172724A (ja) * 1983-03-22 1984-09-29 Canon Inc マーク検出装置
DE3336901A1 (de) * 1983-10-11 1985-04-18 Deutsche Itt Industries Gmbh, 7800 Freiburg Maskenmarkierung und substratmarkierung fuer ein verfahren zum justieren einer eine maskenmarkierung enthaltenden photomaske auf einer substratmarkierung
US4555968A (en) * 1984-06-07 1985-12-03 Preco Industries, Inc. Web fed die cutting press having automatic 3-axis die registration system
US4853880A (en) * 1985-08-23 1989-08-01 Canon Kabushiki Kaisha Device for positioning a semi-conductor wafer
US4972498A (en) * 1988-07-07 1990-11-20 Grumman Aerospace Corporation Alignment system for an optical matched filter correlator
WO1991011056A1 (en) * 1990-01-18 1991-07-25 Spetsialnoe Konstruktorskoe Bjuro Radioelektronnoi Apparatury Instituta Radiofiziki I Elektroniki Akademii Nauk Armyanskoi Ssr Method and device for adjustment of photoelectric converter of shaft rotation angle into code

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497705A (en) * 1968-02-12 1970-02-24 Itek Corp Mask alignment system using radial patterns and flying spot scanning

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497705A (en) * 1968-02-12 1970-02-24 Itek Corp Mask alignment system using radial patterns and flying spot scanning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178573U (ja) * 1987-05-11 1988-11-18
JP2009188404A (ja) * 2008-02-01 2009-08-20 Asml Netherlands Bv アラインメントマーク及びこのようなアラインメントマークを備える基板の位置合わせ方法
US8208121B2 (en) 2008-02-01 2012-06-26 Asml Netherlands B.V. Alignment mark and a method of aligning a substrate comprising such an alignment mark

Also Published As

Publication number Publication date
HK69776A (en) 1976-11-12
GB1326178A (en) 1973-08-08
DE2213171B2 (de) 1978-07-27
US3683195A (en) 1972-08-08
DE2213171A1 (de) 1972-10-19
JPS54133077A (en) 1979-10-16
DE2265346A1 (de) 1977-08-04
DE2213171C3 (de) 1979-04-05
JPS5794942U (ja) 1982-06-11

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