JPS5347775A - Alignment device - Google Patents

Alignment device

Info

Publication number
JPS5347775A
JPS5347775A JP12192976A JP12192976A JPS5347775A JP S5347775 A JPS5347775 A JP S5347775A JP 12192976 A JP12192976 A JP 12192976A JP 12192976 A JP12192976 A JP 12192976A JP S5347775 A JPS5347775 A JP S5347775A
Authority
JP
Japan
Prior art keywords
alignment device
strong
noises
patterns
eliminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12192976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5337712B2 (cs
Inventor
Susumu Aiuchi
Minoru Ikeda
Yoshio Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12192976A priority Critical patent/JPS5347775A/ja
Publication of JPS5347775A publication Critical patent/JPS5347775A/ja
Publication of JPS5337712B2 publication Critical patent/JPS5337712B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP12192976A 1976-10-13 1976-10-13 Alignment device Granted JPS5347775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12192976A JPS5347775A (en) 1976-10-13 1976-10-13 Alignment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12192976A JPS5347775A (en) 1976-10-13 1976-10-13 Alignment device

Publications (2)

Publication Number Publication Date
JPS5347775A true JPS5347775A (en) 1978-04-28
JPS5337712B2 JPS5337712B2 (cs) 1978-10-11

Family

ID=14823409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12192976A Granted JPS5347775A (en) 1976-10-13 1976-10-13 Alignment device

Country Status (1)

Country Link
JP (1) JPS5347775A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144918A (ja) * 1982-12-08 1984-08-20 テキサス・インスツルメンツ・インコ−ポレイテツド 所定パタ−ンの位置決め方法及び装置
JPS59173400A (ja) * 1983-03-17 1984-10-01 本州製紙株式会社 金属性物質の包装用材料の製造方法
JPH0841663A (ja) * 1994-07-28 1996-02-13 Keiwa Shoko Kk 銅系金属腐食防止剤及びそれを用いた銅系金属用防錆紙

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144918A (ja) * 1982-12-08 1984-08-20 テキサス・インスツルメンツ・インコ−ポレイテツド 所定パタ−ンの位置決め方法及び装置
JPS59173400A (ja) * 1983-03-17 1984-10-01 本州製紙株式会社 金属性物質の包装用材料の製造方法
JPH0841663A (ja) * 1994-07-28 1996-02-13 Keiwa Shoko Kk 銅系金属腐食防止剤及びそれを用いた銅系金属用防錆紙

Also Published As

Publication number Publication date
JPS5337712B2 (cs) 1978-10-11

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