JPS5339877A - Manipulator for capacity measurement - Google Patents

Manipulator for capacity measurement

Info

Publication number
JPS5339877A
JPS5339877A JP11370176A JP11370176A JPS5339877A JP S5339877 A JPS5339877 A JP S5339877A JP 11370176 A JP11370176 A JP 11370176A JP 11370176 A JP11370176 A JP 11370176A JP S5339877 A JPS5339877 A JP S5339877A
Authority
JP
Japan
Prior art keywords
manipulator
capacity measurement
capacity
disposing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11370176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5330992B2 (enExample
Inventor
Hideo Tanbara
Heiji Moroshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11370176A priority Critical patent/JPS5339877A/ja
Publication of JPS5339877A publication Critical patent/JPS5339877A/ja
Publication of JPS5330992B2 publication Critical patent/JPS5330992B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11370176A 1976-09-24 1976-09-24 Manipulator for capacity measurement Granted JPS5339877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11370176A JPS5339877A (en) 1976-09-24 1976-09-24 Manipulator for capacity measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11370176A JPS5339877A (en) 1976-09-24 1976-09-24 Manipulator for capacity measurement

Publications (2)

Publication Number Publication Date
JPS5339877A true JPS5339877A (en) 1978-04-12
JPS5330992B2 JPS5330992B2 (enExample) 1978-08-30

Family

ID=14618973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11370176A Granted JPS5339877A (en) 1976-09-24 1976-09-24 Manipulator for capacity measurement

Country Status (1)

Country Link
JP (1) JPS5339877A (enExample)

Also Published As

Publication number Publication date
JPS5330992B2 (enExample) 1978-08-30

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