JPS5339875A - Semiconductor device for detecting position alignment deviation - Google Patents

Semiconductor device for detecting position alignment deviation

Info

Publication number
JPS5339875A
JPS5339875A JP11502076A JP11502076A JPS5339875A JP S5339875 A JPS5339875 A JP S5339875A JP 11502076 A JP11502076 A JP 11502076A JP 11502076 A JP11502076 A JP 11502076A JP S5339875 A JPS5339875 A JP S5339875A
Authority
JP
Japan
Prior art keywords
position alignment
semiconductor device
detecting position
alignment deviation
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11502076A
Other languages
Japanese (ja)
Inventor
Isao Okura
Masashi Omori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11502076A priority Critical patent/JPS5339875A/en
Publication of JPS5339875A publication Critical patent/JPS5339875A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To electrically estimate or assess the goodness or not of the deviation in position alignment with the device wherein an annular gate electrode is made through the insulation on a semiconductor body, using the inner side thereof as source and the outer side as drain.
COPYRIGHT: (C)1978,JPO&Japio
JP11502076A 1976-09-24 1976-09-24 Semiconductor device for detecting position alignment deviation Pending JPS5339875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11502076A JPS5339875A (en) 1976-09-24 1976-09-24 Semiconductor device for detecting position alignment deviation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11502076A JPS5339875A (en) 1976-09-24 1976-09-24 Semiconductor device for detecting position alignment deviation

Publications (1)

Publication Number Publication Date
JPS5339875A true JPS5339875A (en) 1978-04-12

Family

ID=14652248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11502076A Pending JPS5339875A (en) 1976-09-24 1976-09-24 Semiconductor device for detecting position alignment deviation

Country Status (1)

Country Link
JP (1) JPS5339875A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125018A (en) * 1984-11-21 1986-06-12 Nec Corp Pattern and method for detecting pattern alignment error

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125018A (en) * 1984-11-21 1986-06-12 Nec Corp Pattern and method for detecting pattern alignment error
JPH0512848B2 (en) * 1984-11-21 1993-02-19 Nippon Electric Co

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