JPS5336759B2 - - Google Patents
Info
- Publication number
- JPS5336759B2 JPS5336759B2 JP10188972A JP10188972A JPS5336759B2 JP S5336759 B2 JPS5336759 B2 JP S5336759B2 JP 10188972 A JP10188972 A JP 10188972A JP 10188972 A JP10188972 A JP 10188972A JP S5336759 B2 JPS5336759 B2 JP S5336759B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10188972A JPS5336759B2 (enrdf_load_stackoverflow) | 1972-10-13 | 1972-10-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10188972A JPS5336759B2 (enrdf_load_stackoverflow) | 1972-10-13 | 1972-10-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4960683A JPS4960683A (enrdf_load_stackoverflow) | 1974-06-12 |
JPS5336759B2 true JPS5336759B2 (enrdf_load_stackoverflow) | 1978-10-04 |
Family
ID=14312485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10188972A Expired JPS5336759B2 (enrdf_load_stackoverflow) | 1972-10-13 | 1972-10-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5336759B2 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145336U (enrdf_load_stackoverflow) * | 1981-12-28 | 1982-09-13 | ||
JPS60161944U (ja) * | 1985-02-04 | 1985-10-28 | タイガー魔法瓶株式会社 | ポンプ注液式液体容器 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53144270A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Projection-type mask aligner |
US4211489A (en) * | 1978-01-16 | 1980-07-08 | Rca Corporation | Photomask alignment system |
GB2069264A (en) * | 1980-07-02 | 1981-08-19 | Hewlett Packard Co | Data compression apparatus |
JPS6029834A (ja) * | 1983-07-06 | 1985-02-15 | Fuji Electric Co Ltd | デ−タ処理方法 |
-
1972
- 1972-10-13 JP JP10188972A patent/JPS5336759B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145336U (enrdf_load_stackoverflow) * | 1981-12-28 | 1982-09-13 | ||
JPS60161944U (ja) * | 1985-02-04 | 1985-10-28 | タイガー魔法瓶株式会社 | ポンプ注液式液体容器 |
Also Published As
Publication number | Publication date |
---|---|
JPS4960683A (enrdf_load_stackoverflow) | 1974-06-12 |