JPS5335467B2 - - Google Patents

Info

Publication number
JPS5335467B2
JPS5335467B2 JP2497575A JP2497575A JPS5335467B2 JP S5335467 B2 JPS5335467 B2 JP S5335467B2 JP 2497575 A JP2497575 A JP 2497575A JP 2497575 A JP2497575 A JP 2497575A JP S5335467 B2 JPS5335467 B2 JP S5335467B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2497575A
Other languages
Japanese (ja)
Other versions
JPS51100753A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2497575A priority Critical patent/JPS5335467B2/ja
Publication of JPS51100753A publication Critical patent/JPS51100753A/ja
Publication of JPS5335467B2 publication Critical patent/JPS5335467B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2497575A 1975-03-03 1975-03-03 Expired JPS5335467B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2497575A JPS5335467B2 (zh) 1975-03-03 1975-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2497575A JPS5335467B2 (zh) 1975-03-03 1975-03-03

Publications (2)

Publication Number Publication Date
JPS51100753A JPS51100753A (zh) 1976-09-06
JPS5335467B2 true JPS5335467B2 (zh) 1978-09-27

Family

ID=12152964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2497575A Expired JPS5335467B2 (zh) 1975-03-03 1975-03-03

Country Status (1)

Country Link
JP (1) JPS5335467B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560816A (en) * 1978-10-31 1980-05-08 Kazuhiro Toida Automatic reading method for data at indexed position of instrument
JPS6231221Y2 (zh) * 1980-10-16 1987-08-11
JPS5833104A (ja) * 1981-08-21 1983-02-26 Toshiba Corp 組立精度測定方法
JPS58213205A (ja) * 1983-05-16 1983-12-12 Hitachi Ltd 微小寸法測定装置

Also Published As

Publication number Publication date
JPS51100753A (zh) 1976-09-06

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