JPS5335467B2 - - Google Patents

Info

Publication number
JPS5335467B2
JPS5335467B2 JP2497575A JP2497575A JPS5335467B2 JP S5335467 B2 JPS5335467 B2 JP S5335467B2 JP 2497575 A JP2497575 A JP 2497575A JP 2497575 A JP2497575 A JP 2497575A JP S5335467 B2 JPS5335467 B2 JP S5335467B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2497575A
Other languages
Japanese (ja)
Other versions
JPS51100753A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2497575A priority Critical patent/JPS5335467B2/ja
Publication of JPS51100753A publication Critical patent/JPS51100753A/ja
Publication of JPS5335467B2 publication Critical patent/JPS5335467B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2497575A 1975-03-03 1975-03-03 Expired JPS5335467B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2497575A JPS5335467B2 (enrdf_load_stackoverflow) 1975-03-03 1975-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2497575A JPS5335467B2 (enrdf_load_stackoverflow) 1975-03-03 1975-03-03

Publications (2)

Publication Number Publication Date
JPS51100753A JPS51100753A (enrdf_load_stackoverflow) 1976-09-06
JPS5335467B2 true JPS5335467B2 (enrdf_load_stackoverflow) 1978-09-27

Family

ID=12152964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2497575A Expired JPS5335467B2 (enrdf_load_stackoverflow) 1975-03-03 1975-03-03

Country Status (1)

Country Link
JP (1) JPS5335467B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5560816A (en) * 1978-10-31 1980-05-08 Kazuhiro Toida Automatic reading method for data at indexed position of instrument
JPS6231221Y2 (enrdf_load_stackoverflow) * 1980-10-16 1987-08-11
JPS5833104A (ja) * 1981-08-21 1983-02-26 Toshiba Corp 組立精度測定方法
JPS58213205A (ja) * 1983-05-16 1983-12-12 Hitachi Ltd 微小寸法測定装置

Also Published As

Publication number Publication date
JPS51100753A (enrdf_load_stackoverflow) 1976-09-06

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