JPS5334693A - Ozone generating apparatus - Google Patents

Ozone generating apparatus

Info

Publication number
JPS5334693A
JPS5334693A JP11051576A JP11051576A JPS5334693A JP S5334693 A JPS5334693 A JP S5334693A JP 11051576 A JP11051576 A JP 11051576A JP 11051576 A JP11051576 A JP 11051576A JP S5334693 A JPS5334693 A JP S5334693A
Authority
JP
Japan
Prior art keywords
liq
generating apparatus
ozone generating
vessel
mixed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11051576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5437114B2 (enExample
Inventor
Yoshikazu Koyama
Muneharu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Gas Co Ltd
Original Assignee
Osaka Gas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Gas Co Ltd filed Critical Osaka Gas Co Ltd
Priority to JP11051576A priority Critical patent/JPS5334693A/ja
Publication of JPS5334693A publication Critical patent/JPS5334693A/ja
Publication of JPS5437114B2 publication Critical patent/JPS5437114B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP11051576A 1976-09-13 1976-09-13 Ozone generating apparatus Granted JPS5334693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11051576A JPS5334693A (en) 1976-09-13 1976-09-13 Ozone generating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11051576A JPS5334693A (en) 1976-09-13 1976-09-13 Ozone generating apparatus

Publications (2)

Publication Number Publication Date
JPS5334693A true JPS5334693A (en) 1978-03-31
JPS5437114B2 JPS5437114B2 (enExample) 1979-11-13

Family

ID=14537739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11051576A Granted JPS5334693A (en) 1976-09-13 1976-09-13 Ozone generating apparatus

Country Status (1)

Country Link
JP (1) JPS5334693A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4666480A (en) * 1984-03-27 1987-05-19 Reginald Mann Separation of gaseous mixtures
JPS63297202A (ja) * 1987-05-29 1988-12-05 Tokyo Electron Ltd オゾン発生方法およびその装置
JPH01257103A (ja) * 1988-04-05 1989-10-13 Amatani Seisakusho:Kk オゾン濃縮装置
JP2011068560A (ja) * 2010-10-29 2011-04-07 Sumitomo Heavy Ind Ltd オゾン濃縮装置及びオゾン濃縮装置の運転方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4666480A (en) * 1984-03-27 1987-05-19 Reginald Mann Separation of gaseous mixtures
JPS63297202A (ja) * 1987-05-29 1988-12-05 Tokyo Electron Ltd オゾン発生方法およびその装置
JPH01257103A (ja) * 1988-04-05 1989-10-13 Amatani Seisakusho:Kk オゾン濃縮装置
JP2011068560A (ja) * 2010-10-29 2011-04-07 Sumitomo Heavy Ind Ltd オゾン濃縮装置及びオゾン濃縮装置の運転方法

Also Published As

Publication number Publication date
JPS5437114B2 (enExample) 1979-11-13

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