JPS5333053B2 - - Google Patents

Info

Publication number
JPS5333053B2
JPS5333053B2 JP9182973A JP9182973A JPS5333053B2 JP S5333053 B2 JPS5333053 B2 JP S5333053B2 JP 9182973 A JP9182973 A JP 9182973A JP 9182973 A JP9182973 A JP 9182973A JP S5333053 B2 JPS5333053 B2 JP S5333053B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9182973A
Other languages
Japanese (ja)
Other versions
JPS5040116A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9182973A priority Critical patent/JPS5333053B2/ja
Publication of JPS5040116A publication Critical patent/JPS5040116A/ja
Publication of JPS5333053B2 publication Critical patent/JPS5333053B2/ja
Expired legal-status Critical Current

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JP9182973A 1973-08-15 1973-08-15 Expired JPS5333053B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9182973A JPS5333053B2 (fr) 1973-08-15 1973-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9182973A JPS5333053B2 (fr) 1973-08-15 1973-08-15

Publications (2)

Publication Number Publication Date
JPS5040116A JPS5040116A (fr) 1975-04-12
JPS5333053B2 true JPS5333053B2 (fr) 1978-09-12

Family

ID=14037481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9182973A Expired JPS5333053B2 (fr) 1973-08-15 1973-08-15

Country Status (1)

Country Link
JP (1) JPS5333053B2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2642949C3 (de) * 1976-09-24 1980-11-20 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung von innenbeschichteten Glasrohren zum Ziehen von Lichtleitfasern
FR2371524A1 (fr) * 1976-11-18 1978-06-16 Alsthom Atlantique Procede de depot d'une couche mince par decomposition d'un gaz dans un plasma
JPS56275A (en) * 1979-06-12 1981-01-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Metal film formation
JPS5693344A (en) * 1979-12-26 1981-07-28 Fujitsu Ltd Manufacture of semiconductor device
JPS6184836A (ja) * 1984-10-02 1986-04-30 Dainippon Screen Mfg Co Ltd 薄膜形成方法

Also Published As

Publication number Publication date
JPS5040116A (fr) 1975-04-12

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