JPS5326185A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS5326185A
JPS5326185A JP10088476A JP10088476A JPS5326185A JP S5326185 A JPS5326185 A JP S5326185A JP 10088476 A JP10088476 A JP 10088476A JP 10088476 A JP10088476 A JP 10088476A JP S5326185 A JPS5326185 A JP S5326185A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
time
defect inspecting
examined
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10088476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5626817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kenji Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP10088476A priority Critical patent/JPS5326185A/ja
Publication of JPS5326185A publication Critical patent/JPS5326185A/ja
Publication of JPS5626817B2 publication Critical patent/JPS5626817B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10088476A 1976-08-23 1976-08-23 Defect inspecting apparatus Granted JPS5326185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10088476A JPS5326185A (en) 1976-08-23 1976-08-23 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10088476A JPS5326185A (en) 1976-08-23 1976-08-23 Defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5326185A true JPS5326185A (en) 1978-03-10
JPS5626817B2 JPS5626817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-20

Family

ID=14285742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10088476A Granted JPS5326185A (en) 1976-08-23 1976-08-23 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5326185A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187746U (ja) * 1983-05-31 1984-12-13 東英電子工業株式会社 ピンホ−ル検出機構
JPS6036299U (ja) * 1983-08-18 1985-03-13 株式会社　パックサプライセンタ− 飾樽用芯樽

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187746U (ja) * 1983-05-31 1984-12-13 東英電子工業株式会社 ピンホ−ル検出機構
JPS6036299U (ja) * 1983-08-18 1985-03-13 株式会社　パックサプライセンタ− 飾樽用芯樽

Also Published As

Publication number Publication date
JPS5626817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-20

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