JPS5324790B2 - - Google Patents

Info

Publication number
JPS5324790B2
JPS5324790B2 JP9448776A JP9448776A JPS5324790B2 JP S5324790 B2 JPS5324790 B2 JP S5324790B2 JP 9448776 A JP9448776 A JP 9448776A JP 9448776 A JP9448776 A JP 9448776A JP S5324790 B2 JPS5324790 B2 JP S5324790B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9448776A
Other languages
Japanese (ja)
Other versions
JPS5320773A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9448776A priority Critical patent/JPS5320773A/ja
Publication of JPS5320773A publication Critical patent/JPS5320773A/ja
Publication of JPS5324790B2 publication Critical patent/JPS5324790B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9448776A 1976-08-10 1976-08-10 Electron beam scanning apparatus and its scanning method Granted JPS5320773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9448776A JPS5320773A (en) 1976-08-10 1976-08-10 Electron beam scanning apparatus and its scanning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9448776A JPS5320773A (en) 1976-08-10 1976-08-10 Electron beam scanning apparatus and its scanning method

Publications (2)

Publication Number Publication Date
JPS5320773A JPS5320773A (en) 1978-02-25
JPS5324790B2 true JPS5324790B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-22

Family

ID=14111637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9448776A Granted JPS5320773A (en) 1976-08-10 1976-08-10 Electron beam scanning apparatus and its scanning method

Country Status (1)

Country Link
JP (1) JPS5320773A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515219A (en) * 1978-07-18 1980-02-02 Chiyou Lsi Gijutsu Kenkyu Kumiai Electronic beam exposure device
JP5204451B2 (ja) * 2007-09-28 2013-06-05 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置および荷電粒子ビーム描画方法
WO2020026594A1 (ja) 2018-07-31 2020-02-06 Jfeスチール株式会社 高強度熱延めっき鋼板

Also Published As

Publication number Publication date
JPS5320773A (en) 1978-02-25

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