JPS5324776B2 - - Google Patents

Info

Publication number
JPS5324776B2
JPS5324776B2 JP7657375A JP7657375A JPS5324776B2 JP S5324776 B2 JPS5324776 B2 JP S5324776B2 JP 7657375 A JP7657375 A JP 7657375A JP 7657375 A JP7657375 A JP 7657375A JP S5324776 B2 JPS5324776 B2 JP S5324776B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7657375A
Other languages
Japanese (ja)
Other versions
JPS522164A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7657375A priority Critical patent/JPS522164A/ja
Publication of JPS522164A publication Critical patent/JPS522164A/ja
Publication of JPS5324776B2 publication Critical patent/JPS5324776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP7657375A 1975-06-24 1975-06-24 Wafer cleaning and drying device Granted JPS522164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7657375A JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7657375A JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Publications (2)

Publication Number Publication Date
JPS522164A JPS522164A (en) 1977-01-08
JPS5324776B2 true JPS5324776B2 (fr) 1978-07-22

Family

ID=13608973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7657375A Granted JPS522164A (en) 1975-06-24 1975-06-24 Wafer cleaning and drying device

Country Status (1)

Country Link
JP (1) JPS522164A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586963A (en) * 1978-12-22 1980-07-01 Hitachi Ltd Sealing device
US5069236A (en) * 1990-03-07 1991-12-03 Pathway Systems, Inc. Method and apparatus for cleaning disks
US5107880A (en) * 1990-03-07 1992-04-28 Pathway Systems, Inc. Disk cleaning apparatus

Also Published As

Publication number Publication date
JPS522164A (en) 1977-01-08

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