JPS5324299B2 - - Google Patents
Info
- Publication number
- JPS5324299B2 JPS5324299B2 JP7657275A JP7657275A JPS5324299B2 JP S5324299 B2 JPS5324299 B2 JP S5324299B2 JP 7657275 A JP7657275 A JP 7657275A JP 7657275 A JP7657275 A JP 7657275A JP S5324299 B2 JPS5324299 B2 JP S5324299B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7657275A JPS522163A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7657275A JPS522163A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS522163A JPS522163A (en) | 1977-01-08 |
| JPS5324299B2 true JPS5324299B2 (fr) | 1978-07-20 |
Family
ID=13608941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7657275A Granted JPS522163A (en) | 1975-06-24 | 1975-06-24 | Wafer cleaning and drying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS522163A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02103805U (fr) * | 1989-02-03 | 1990-08-17 | ||
| US5069236A (en) * | 1990-03-07 | 1991-12-03 | Pathway Systems, Inc. | Method and apparatus for cleaning disks |
| US5107880A (en) * | 1990-03-07 | 1992-04-28 | Pathway Systems, Inc. | Disk cleaning apparatus |
-
1975
- 1975-06-24 JP JP7657275A patent/JPS522163A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS522163A (en) | 1977-01-08 |