JPS5324605A - Biimorph vibrator pumps - Google Patents

Biimorph vibrator pumps

Info

Publication number
JPS5324605A
JPS5324605A JP9822776A JP9822776A JPS5324605A JP S5324605 A JPS5324605 A JP S5324605A JP 9822776 A JP9822776 A JP 9822776A JP 9822776 A JP9822776 A JP 9822776A JP S5324605 A JPS5324605 A JP S5324605A
Authority
JP
Japan
Prior art keywords
biimorph
vibrator
pumps
vibrator pumps
biimorph vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9822776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5534316B2 (enrdf_load_stackoverflow
Inventor
Tetsuji Narasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUKUU UCHIYUU GIJIYUTSU KENKI
Original Assignee
KOUKUU UCHIYUU GIJIYUTSU KENKI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUKUU UCHIYUU GIJIYUTSU KENKI filed Critical KOUKUU UCHIYUU GIJIYUTSU KENKI
Priority to JP9822776A priority Critical patent/JPS5324605A/ja
Publication of JPS5324605A publication Critical patent/JPS5324605A/ja
Publication of JPS5534316B2 publication Critical patent/JPS5534316B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP9822776A 1976-08-19 1976-08-19 Biimorph vibrator pumps Granted JPS5324605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822776A JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Publications (2)

Publication Number Publication Date
JPS5324605A true JPS5324605A (en) 1978-03-07
JPS5534316B2 JPS5534316B2 (enrdf_load_stackoverflow) 1980-09-05

Family

ID=14214062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822776A Granted JPS5324605A (en) 1976-08-19 1976-08-19 Biimorph vibrator pumps

Country Status (1)

Country Link
JP (1) JPS5324605A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634986A (en) * 1979-08-28 1981-04-07 Kureha Chem Ind Co Ltd Fluid minute drive unit
JPS58101276A (ja) * 1981-12-04 1983-06-16 サミユエル ピ−.ベスマン 圧電効果ダイヤフラム式マイクロポンプ装置
JPS58112329U (ja) * 1982-11-15 1983-08-01 呉羽化学工業株式会社 流体の微駆動装置
JPS5968578A (ja) * 1982-10-08 1984-04-18 Sharp Corp 送液ポンプ
JPS5968192U (ja) * 1982-10-29 1984-05-09 シャープ株式会社 気化式液体燃料燃焼装置
JPS5982591A (ja) * 1982-11-01 1984-05-12 Sharp Corp 送液ポンプ
WO2005012730A1 (ja) * 2003-08-05 2005-02-10 Eamex Corporation ポンプ
JP2008259381A (ja) * 2007-04-09 2008-10-23 Eamex Co アクチュエータ体および絞り機構
JP2013096262A (ja) * 2011-10-28 2013-05-20 Lucas Ihsl セラミック振動子を具備する油圧動力ユニット、及び該油圧動力ユニットを具備する油圧エンジン
JP2015505014A (ja) * 2012-08-15 2015-02-16 ベイジンウェスト・インダストリーズ・カンパニー・リミテッドBeijingwest Industries Co., Ltd. マウント装置
JP2020139457A (ja) * 2019-02-28 2020-09-03 株式会社イワキ チューブフラムポンプ

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634986A (en) * 1979-08-28 1981-04-07 Kureha Chem Ind Co Ltd Fluid minute drive unit
JPS58101276A (ja) * 1981-12-04 1983-06-16 サミユエル ピ−.ベスマン 圧電効果ダイヤフラム式マイクロポンプ装置
JPS5968578A (ja) * 1982-10-08 1984-04-18 Sharp Corp 送液ポンプ
JPS5968192U (ja) * 1982-10-29 1984-05-09 シャープ株式会社 気化式液体燃料燃焼装置
JPS5982591A (ja) * 1982-11-01 1984-05-12 Sharp Corp 送液ポンプ
JPS58112329U (ja) * 1982-11-15 1983-08-01 呉羽化学工業株式会社 流体の微駆動装置
WO2005012730A1 (ja) * 2003-08-05 2005-02-10 Eamex Corporation ポンプ
WO2008126613A1 (ja) * 2007-04-09 2008-10-23 Eamex Corporation アクチュエータ体および絞り機構
JP2008259381A (ja) * 2007-04-09 2008-10-23 Eamex Co アクチュエータ体および絞り機構
US7917027B2 (en) 2007-04-09 2011-03-29 Eamex Corporation Actuator body and throttle mechanism
JP2013096262A (ja) * 2011-10-28 2013-05-20 Lucas Ihsl セラミック振動子を具備する油圧動力ユニット、及び該油圧動力ユニットを具備する油圧エンジン
JP2015505014A (ja) * 2012-08-15 2015-02-16 ベイジンウェスト・インダストリーズ・カンパニー・リミテッドBeijingwest Industries Co., Ltd. マウント装置
EP2820321A4 (en) * 2012-08-15 2016-01-20 Beijingwest Ind Co Ltd SUPPORT DEVICE
US9440524B2 (en) 2012-08-15 2016-09-13 Beijingwest Industries, Co., Ltd. Mount apparatus
JP2020139457A (ja) * 2019-02-28 2020-09-03 株式会社イワキ チューブフラムポンプ
US11313362B2 (en) 2019-02-28 2022-04-26 Iwaki Co., Ltd. Tubephragm pump

Also Published As

Publication number Publication date
JPS5534316B2 (enrdf_load_stackoverflow) 1980-09-05

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