JPS5324303B2 - - Google Patents

Info

Publication number
JPS5324303B2
JPS5324303B2 JP1323375A JP1323375A JPS5324303B2 JP S5324303 B2 JPS5324303 B2 JP S5324303B2 JP 1323375 A JP1323375 A JP 1323375A JP 1323375 A JP1323375 A JP 1323375A JP S5324303 B2 JPS5324303 B2 JP S5324303B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1323375A
Other languages
Japanese (ja)
Other versions
JPS5188182A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1323375A priority Critical patent/JPS5324303B2/ja
Publication of JPS5188182A publication Critical patent/JPS5188182A/ja
Publication of JPS5324303B2 publication Critical patent/JPS5324303B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1323375A 1975-01-31 1975-01-31 Expired JPS5324303B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1323375A JPS5324303B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1323375A JPS5324303B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5188182A JPS5188182A (enrdf_load_stackoverflow) 1976-08-02
JPS5324303B2 true JPS5324303B2 (enrdf_load_stackoverflow) 1978-07-20

Family

ID=11827457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1323375A Expired JPS5324303B2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS5324303B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175832A (ja) * 1983-03-07 1983-10-15 Hitachi Ltd プラズマ処理装置
US4554047A (en) * 1984-10-12 1985-11-19 At&T Bell Laboratories Downstream apparatus and technique
JPH08288096A (ja) * 1995-02-13 1996-11-01 Mitsubishi Electric Corp プラズマ処理装置
JP2920874B2 (ja) * 1995-07-25 1999-07-19 東京応化工業株式会社 プラズマ反応処理装置
JPH10270428A (ja) * 1997-03-27 1998-10-09 Mitsubishi Electric Corp プラズマ処理装置
JPH10270430A (ja) 1997-03-27 1998-10-09 Mitsubishi Electric Corp プラズマ処理装置
JP2005149956A (ja) * 2003-11-17 2005-06-09 Ulvac Japan Ltd 大面積高均一プラズマ処理方法及び装置

Also Published As

Publication number Publication date
JPS5188182A (enrdf_load_stackoverflow) 1976-08-02

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