JPS5324233A - Pattern examination system - Google Patents

Pattern examination system

Info

Publication number
JPS5324233A
JPS5324233A JP9900976A JP9900976A JPS5324233A JP S5324233 A JPS5324233 A JP S5324233A JP 9900976 A JP9900976 A JP 9900976A JP 9900976 A JP9900976 A JP 9900976A JP S5324233 A JPS5324233 A JP S5324233A
Authority
JP
Japan
Prior art keywords
pattern
examination system
pattern examination
line width
pattern line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9900976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5646630B2 (https=
Inventor
Masahito Nakajima
Katsumi Fujiwara
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9900976A priority Critical patent/JPS5324233A/ja
Publication of JPS5324233A publication Critical patent/JPS5324233A/ja
Publication of JPS5646630B2 publication Critical patent/JPS5646630B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
JP9900976A 1976-08-19 1976-08-19 Pattern examination system Granted JPS5324233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Publications (2)

Publication Number Publication Date
JPS5324233A true JPS5324233A (en) 1978-03-06
JPS5646630B2 JPS5646630B2 (https=) 1981-11-04

Family

ID=14235068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9900976A Granted JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Country Status (1)

Country Link
JP (1) JPS5324233A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001002A1 (en) * 1978-10-30 1980-05-15 Fujitsu Ltd Pattern inspection system
JPS55500331A (https=) * 1978-03-13 1980-06-12
JPS5940106A (ja) * 1982-08-30 1984-03-05 Fujitsu Ltd トリガ信号発生装置
DE2953303C2 (de) 1978-10-30 1987-04-16 Fujitsu Ltd., Kawasaki, Kanagawa Musterüberprüfungssystem

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (https=) * 1974-02-06 1975-09-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (https=) * 1974-02-06 1975-09-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500331A (https=) * 1978-03-13 1980-06-12
WO1980001002A1 (en) * 1978-10-30 1980-05-15 Fujitsu Ltd Pattern inspection system
DE2953303C2 (de) 1978-10-30 1987-04-16 Fujitsu Ltd., Kawasaki, Kanagawa Musterüberprüfungssystem
JPS5940106A (ja) * 1982-08-30 1984-03-05 Fujitsu Ltd トリガ信号発生装置

Also Published As

Publication number Publication date
JPS5646630B2 (https=) 1981-11-04

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