JPS5646630B2 - - Google Patents
Info
- Publication number
- JPS5646630B2 JPS5646630B2 JP9900976A JP9900976A JPS5646630B2 JP S5646630 B2 JPS5646630 B2 JP S5646630B2 JP 9900976 A JP9900976 A JP 9900976A JP 9900976 A JP9900976 A JP 9900976A JP S5646630 B2 JPS5646630 B2 JP S5646630B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9900976A JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9900976A JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5324233A JPS5324233A (en) | 1978-03-06 |
| JPS5646630B2 true JPS5646630B2 (https=) | 1981-11-04 |
Family
ID=14235068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9900976A Granted JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5324233A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0153555B2 (https=) * | 1978-03-13 | 1989-11-14 | Rca Licensing Corp | |
| WO1980001002A1 (en) * | 1978-10-30 | 1980-05-15 | Fujitsu Ltd | Pattern inspection system |
| JPS593681B2 (ja) | 1978-10-30 | 1984-01-25 | 富士通株式会社 | パタ−ン検査方式 |
| JPS5940106A (ja) * | 1982-08-30 | 1984-03-05 | Fujitsu Ltd | トリガ信号発生装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
-
1976
- 1976-08-19 JP JP9900976A patent/JPS5324233A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5324233A (en) | 1978-03-06 |