JPS5318677B2 - - Google Patents

Info

Publication number
JPS5318677B2
JPS5318677B2 JP11571375A JP11571375A JPS5318677B2 JP S5318677 B2 JPS5318677 B2 JP S5318677B2 JP 11571375 A JP11571375 A JP 11571375A JP 11571375 A JP11571375 A JP 11571375A JP S5318677 B2 JPS5318677 B2 JP S5318677B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11571375A
Other languages
Japanese (ja)
Other versions
JPS5165299A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5165299A publication Critical patent/JPS5165299A/ja
Publication of JPS5318677B2 publication Critical patent/JPS5318677B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
JP11571375A 1974-11-29 1975-09-26 Expired JPS5318677B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US528312A US3924134A (en) 1974-11-29 1974-11-29 Double chamber ion source

Publications (2)

Publication Number Publication Date
JPS5165299A JPS5165299A (en) 1976-06-05
JPS5318677B2 true JPS5318677B2 (en) 1978-06-16

Family

ID=24105152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11571375A Expired JPS5318677B2 (en) 1974-11-29 1975-09-26

Country Status (12)

Country Link
US (1) US3924134A (en)
JP (1) JPS5318677B2 (en)
BR (1) BR7507901A (en)
CA (1) CA1039860A (en)
CH (1) CH587562A5 (en)
DE (1) DE2552783B2 (en)
ES (1) ES443060A1 (en)
FR (1) FR2293055A1 (en)
GB (1) GB1497913A (en)
IT (1) IT1042770B (en)
NL (1) NL7513431A (en)
SE (1) SE402672B (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4045677A (en) * 1976-06-11 1977-08-30 Cornell Research Foundation, Inc. Intense ion beam generator
US4105916A (en) * 1977-02-28 1978-08-08 Extranuclear Laboratories, Inc. Methods and apparatus for simultaneously producing and electronically separating the chemical ionization mass spectrum and the electron impact ionization mass spectrum of the same sample material
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4206383A (en) * 1978-09-11 1980-06-03 California Institute Of Technology Miniature cyclotron resonance ion source using small permanent magnet
US4301391A (en) * 1979-04-26 1981-11-17 Hughes Aircraft Company Dual discharge plasma device
FR2550681B1 (en) * 1983-08-12 1985-12-06 Centre Nat Rech Scient ION SOURCE HAS AT LEAST TWO IONIZATION CHAMBERS, PARTICULARLY FOR THE FORMATION OF CHEMICALLY REACTIVE ION BEAMS
FR2595868B1 (en) * 1986-03-13 1988-05-13 Commissariat Energie Atomique ION SOURCE WITH ELECTRONIC CYCLOTRON RESONANCE WITH COAXIAL INJECTION OF ELECTROMAGNETIC WAVES
KR900003310B1 (en) * 1986-05-27 1990-05-14 리가가구 겡큐소 Ion producing apparatus
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
JP2530434B2 (en) * 1986-08-13 1996-09-04 日本テキサス・インスツルメンツ株式会社 Ion generator
GB8726638D0 (en) * 1987-11-13 1987-12-16 Vg Instr Groups Ltd High sensitivity mass spectrometer
GB2230644B (en) * 1989-02-16 1994-03-23 Tokyo Electron Ltd Electron beam excitation ion source
JP2873693B2 (en) * 1989-05-25 1999-03-24 東京エレクトロン株式会社 Ion source
RU2084085C1 (en) * 1995-07-14 1997-07-10 Центральный научно-исследовательский институт машиностроения Closed electron drift accelerator
US5962858A (en) * 1997-07-10 1999-10-05 Eaton Corporation Method of implanting low doses of ions into a substrate
US6452338B1 (en) * 1999-12-13 2002-09-17 Semequip, Inc. Electron beam ion source with integral low-temperature vaporizer
US6642641B2 (en) * 2001-04-19 2003-11-04 Inficon, Inc. Apparatus for measuring total pressure and partial pressure with common electron beam
CN103887132B (en) * 2012-12-20 2016-12-28 中芯国际集成电路制造(上海)有限公司 The ion source of injection device and ion injection method
US9117617B2 (en) * 2013-06-24 2015-08-25 Agilent Technologies, Inc. Axial magnetic ion source and related ionization methods
US20140374583A1 (en) * 2013-06-24 2014-12-25 Agilent Technologies, Inc. Electron ionization (ei) utilizing different ei energies
EP3084804B1 (en) 2013-12-20 2018-03-14 Nicholas R. White A ribbon beam ion source of arbitrary length
US10176977B2 (en) 2014-12-12 2019-01-08 Agilent Technologies, Inc. Ion source for soft electron ionization and related systems and methods
JP7112517B2 (en) * 2018-05-11 2022-08-03 レコ コーポレイション Ion source and mass spectrometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (en) * 1961-12-11
GB1252569A (en) * 1968-12-17 1971-11-10
FR2061809A5 (en) * 1969-04-04 1971-06-25 Commissariat Energie Atomique

Also Published As

Publication number Publication date
DE2552783A1 (en) 1976-08-12
SE402672B (en) 1978-07-10
IT1042770B (en) 1980-01-30
FR2293055A1 (en) 1976-06-25
FR2293055B1 (en) 1978-04-07
US3924134A (en) 1975-12-02
CA1039860A (en) 1978-10-03
GB1497913A (en) 1978-01-12
ES443060A1 (en) 1977-04-01
NL7513431A (en) 1976-06-01
SE7511786L (en) 1976-05-31
BR7507901A (en) 1976-08-10
DE2552783B2 (en) 1977-04-28
JPS5165299A (en) 1976-06-05
CH587562A5 (en) 1977-05-13

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