JPS5316377A - Evapolation depositing method - Google Patents

Evapolation depositing method

Info

Publication number
JPS5316377A
JPS5316377A JP9272877A JP9272877A JPS5316377A JP S5316377 A JPS5316377 A JP S5316377A JP 9272877 A JP9272877 A JP 9272877A JP 9272877 A JP9272877 A JP 9272877A JP S5316377 A JPS5316377 A JP S5316377A
Authority
JP
Japan
Prior art keywords
evapolation
depositing method
evaporation
incluined
ecaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9272877A
Other languages
Japanese (ja)
Inventor
Shigemitsu Nemoto
Isamu Kajita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9272877A priority Critical patent/JPS5316377A/en
Publication of JPS5316377A publication Critical patent/JPS5316377A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the close adhesive strength between the substrate and evaporation part and to decrease the mechanical shock and also, to heighten the durability, by using incluined protective board at the time of evaporation and giving the slope to to the film thickness at the tip end of ecaporation layer.
JP9272877A 1977-08-02 1977-08-02 Evapolation depositing method Pending JPS5316377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9272877A JPS5316377A (en) 1977-08-02 1977-08-02 Evapolation depositing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9272877A JPS5316377A (en) 1977-08-02 1977-08-02 Evapolation depositing method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7212074A Division JPS511380A (en) 1974-06-24 1974-06-24 JOCHAKUHOHO

Publications (1)

Publication Number Publication Date
JPS5316377A true JPS5316377A (en) 1978-02-15

Family

ID=14062480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9272877A Pending JPS5316377A (en) 1977-08-02 1977-08-02 Evapolation depositing method

Country Status (1)

Country Link
JP (1) JPS5316377A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006241588A (en) * 2005-03-02 2006-09-14 Asia Optical Co Ltd Gradient type optical thin film formation device, and tool therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006241588A (en) * 2005-03-02 2006-09-14 Asia Optical Co Ltd Gradient type optical thin film formation device, and tool therefor
JP4509943B2 (en) * 2005-03-02 2010-07-21 亜洲光学股▲ふん▼有限公司 Gradient optical thin film forming apparatus and jig

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