JPS5315252U - - Google Patents

Info

Publication number
JPS5315252U
JPS5315252U JP9514376U JP9514376U JPS5315252U JP S5315252 U JPS5315252 U JP S5315252U JP 9514376 U JP9514376 U JP 9514376U JP 9514376 U JP9514376 U JP 9514376U JP S5315252 U JPS5315252 U JP S5315252U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9514376U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9514376U priority Critical patent/JPS5315252U/ja
Publication of JPS5315252U publication Critical patent/JPS5315252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Stopping Of Electric Motors (AREA)
JP9514376U 1976-07-19 1976-07-19 Pending JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9514376U JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-19 1976-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9514376U JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-19 1976-07-19

Publications (1)

Publication Number Publication Date
JPS5315252U true JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-02-08

Family

ID=28705623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9514376U Pending JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-07-19 1976-07-19

Country Status (1)

Country Link
JP (1) JPS5315252U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160608A (ja) * 1984-02-01 1985-08-22 Hitachi Ltd キヤリアボツクス
JPS60194516A (ja) * 1984-03-16 1985-10-03 Hitachi Ltd ウエハケ−ス
JPS60223111A (ja) * 1984-04-20 1985-11-07 Hitachi Ltd 半導体ウェーハ用収納ケース

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160608A (ja) * 1984-02-01 1985-08-22 Hitachi Ltd キヤリアボツクス
JPS60194516A (ja) * 1984-03-16 1985-10-03 Hitachi Ltd ウエハケ−ス
JPS60223111A (ja) * 1984-04-20 1985-11-07 Hitachi Ltd 半導体ウェーハ用収納ケース

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