JPS5315246Y2 - - Google Patents
Info
- Publication number
- JPS5315246Y2 JPS5315246Y2 JP5392472U JP5392472U JPS5315246Y2 JP S5315246 Y2 JPS5315246 Y2 JP S5315246Y2 JP 5392472 U JP5392472 U JP 5392472U JP 5392472 U JP5392472 U JP 5392472U JP S5315246 Y2 JPS5315246 Y2 JP S5315246Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Connecting Device With Holders (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392472U JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392472U JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4911658U JPS4911658U (en:Method) | 1974-01-31 |
| JPS5315246Y2 true JPS5315246Y2 (en:Method) | 1978-04-21 |
Family
ID=27936811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5392472U Expired JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315246Y2 (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5729308Y2 (en:Method) * | 1976-05-06 | 1982-06-26 | ||
| JPS5527240Y2 (en:Method) * | 1977-10-03 | 1980-06-30 | ||
| JP2806431B2 (ja) * | 1989-04-28 | 1998-09-30 | 株式会社ニデック | ウェーハ搬送装置 |
| JPH04103652U (ja) * | 1991-02-18 | 1992-09-07 | 株式会社富士通宮城エレクトロニクス | バキユームピンセツト |
| JP2806671B2 (ja) * | 1992-01-28 | 1998-09-30 | 九州日本電気株式会社 | ウェーハ保持具 |
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1972
- 1972-05-08 JP JP5392472U patent/JPS5315246Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4911658U (en:Method) | 1974-01-31 |