JPS4911658U - - Google Patents
Info
- Publication number
- JPS4911658U JPS4911658U JP5392472U JP5392472U JPS4911658U JP S4911658 U JPS4911658 U JP S4911658U JP 5392472 U JP5392472 U JP 5392472U JP 5392472 U JP5392472 U JP 5392472U JP S4911658 U JPS4911658 U JP S4911658U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Connecting Device With Holders (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392472U JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5392472U JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4911658U true JPS4911658U (en:Method) | 1974-01-31 |
| JPS5315246Y2 JPS5315246Y2 (en:Method) | 1978-04-21 |
Family
ID=27936811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5392472U Expired JPS5315246Y2 (en:Method) | 1972-05-08 | 1972-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315246Y2 (en:Method) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52148051U (en:Method) * | 1976-05-06 | 1977-11-09 | ||
| JPS5459263U (en:Method) * | 1977-10-03 | 1979-04-24 | ||
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH04103652U (ja) * | 1991-02-18 | 1992-09-07 | 株式会社富士通宮城エレクトロニクス | バキユームピンセツト |
| JPH05206248A (ja) * | 1992-01-28 | 1993-08-13 | Nec Kyushu Ltd | ウェーハ保持具 |
-
1972
- 1972-05-08 JP JP5392472U patent/JPS5315246Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52148051U (en:Method) * | 1976-05-06 | 1977-11-09 | ||
| JPS5459263U (en:Method) * | 1977-10-03 | 1979-04-24 | ||
| JPH02292196A (ja) * | 1989-04-28 | 1990-12-03 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH04103652U (ja) * | 1991-02-18 | 1992-09-07 | 株式会社富士通宮城エレクトロニクス | バキユームピンセツト |
| JPH05206248A (ja) * | 1992-01-28 | 1993-08-13 | Nec Kyushu Ltd | ウェーハ保持具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5315246Y2 (en:Method) | 1978-04-21 |