JPS5315110B2 - - Google Patents

Info

Publication number
JPS5315110B2
JPS5315110B2 JP7024372A JP7024372A JPS5315110B2 JP S5315110 B2 JPS5315110 B2 JP S5315110B2 JP 7024372 A JP7024372 A JP 7024372A JP 7024372 A JP7024372 A JP 7024372A JP S5315110 B2 JPS5315110 B2 JP S5315110B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7024372A
Other languages
Japanese (ja)
Other versions
JPS4928687A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7024372A priority Critical patent/JPS5315110B2/ja
Publication of JPS4928687A publication Critical patent/JPS4928687A/ja
Publication of JPS5315110B2 publication Critical patent/JPS5315110B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Paints Or Removers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
JP7024372A 1972-07-13 1972-07-13 Expired JPS5315110B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7024372A JPS5315110B2 (https=) 1972-07-13 1972-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7024372A JPS5315110B2 (https=) 1972-07-13 1972-07-13

Publications (2)

Publication Number Publication Date
JPS4928687A JPS4928687A (https=) 1974-03-14
JPS5315110B2 true JPS5315110B2 (https=) 1978-05-22

Family

ID=13425917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7024372A Expired JPS5315110B2 (https=) 1972-07-13 1972-07-13

Country Status (1)

Country Link
JP (1) JPS5315110B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144300U (https=) * 1985-02-28 1986-09-05

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337290Y2 (https=) * 1973-02-06 1978-09-09
JPS5435240Y2 (https=) * 1975-04-25 1979-10-26
JPS59217704A (ja) * 1983-05-25 1984-12-07 Mitsui Toatsu Chem Inc ポリマ−の改質方法
JPS61254257A (ja) * 1985-05-01 1986-11-12 Mitsubishi Chem Ind Ltd ポリイミド溶液の脱塩方法
JP2771075B2 (ja) * 1991-09-03 1998-07-02 オリン・マイクロエレクトロニツク・ケミカルズ・インコーポレイテツド レジスト成分からの金属不純物除去方法
JP2771076B2 (ja) * 1991-09-03 1998-07-02 オリン・マイクロエレクトロニツク・ケミカルズ・インコーポレイテツド レジスト成分からの金属不純物の除去方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144300U (https=) * 1985-02-28 1986-09-05

Also Published As

Publication number Publication date
JPS4928687A (https=) 1974-03-14

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