JPS5315110B2 - - Google Patents

Info

Publication number
JPS5315110B2
JPS5315110B2 JP7024372A JP7024372A JPS5315110B2 JP S5315110 B2 JPS5315110 B2 JP S5315110B2 JP 7024372 A JP7024372 A JP 7024372A JP 7024372 A JP7024372 A JP 7024372A JP S5315110 B2 JPS5315110 B2 JP S5315110B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7024372A
Other languages
Japanese (ja)
Other versions
JPS4928687A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7024372A priority Critical patent/JPS5315110B2/ja
Publication of JPS4928687A publication Critical patent/JPS4928687A/ja
Publication of JPS5315110B2 publication Critical patent/JPS5315110B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Paints Or Removers (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP7024372A 1972-07-13 1972-07-13 Expired JPS5315110B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7024372A JPS5315110B2 (cs) 1972-07-13 1972-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7024372A JPS5315110B2 (cs) 1972-07-13 1972-07-13

Publications (2)

Publication Number Publication Date
JPS4928687A JPS4928687A (cs) 1974-03-14
JPS5315110B2 true JPS5315110B2 (cs) 1978-05-22

Family

ID=13425917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7024372A Expired JPS5315110B2 (cs) 1972-07-13 1972-07-13

Country Status (1)

Country Link
JP (1) JPS5315110B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144300U (cs) * 1985-02-28 1986-09-05

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337290Y2 (cs) * 1973-02-06 1978-09-09
JPS5435240Y2 (cs) * 1975-04-25 1979-10-26
JPS59217704A (ja) * 1983-05-25 1984-12-07 Mitsui Toatsu Chem Inc ポリマ−の改質方法
JPS61254257A (ja) * 1985-05-01 1986-11-12 Mitsubishi Chem Ind Ltd ポリイミド溶液の脱塩方法
JP2771076B2 (ja) * 1991-09-03 1998-07-02 オリン・マイクロエレクトロニツク・ケミカルズ・インコーポレイテツド レジスト成分からの金属不純物の除去方法
JP2771075B2 (ja) * 1991-09-03 1998-07-02 オリン・マイクロエレクトロニツク・ケミカルズ・インコーポレイテツド レジスト成分からの金属不純物除去方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61144300U (cs) * 1985-02-28 1986-09-05

Also Published As

Publication number Publication date
JPS4928687A (cs) 1974-03-14

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