JPS53146577A - Mos and mis electrostatic induction fet transistor - Google Patents

Mos and mis electrostatic induction fet transistor

Info

Publication number
JPS53146577A
JPS53146577A JP175677A JP175677A JPS53146577A JP S53146577 A JPS53146577 A JP S53146577A JP 175677 A JP175677 A JP 175677A JP 175677 A JP175677 A JP 175677A JP S53146577 A JPS53146577 A JP S53146577A
Authority
JP
Japan
Prior art keywords
mis
mos
electrostatic induction
fet transistor
fet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP175677A
Other languages
English (en)
Other versions
JPS5856270B2 (ja
Inventor
Jiyunichi Nishizawa
Tadahiro Oomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP52001756A priority Critical patent/JPS5856270B2/ja
Priority to DE19782801085 priority patent/DE2801085A1/de
Publication of JPS53146577A publication Critical patent/JPS53146577A/ja
Publication of JPS5856270B2 publication Critical patent/JPS5856270B2/ja
Priority to US06/814,030 priority patent/US4814839A/en
Priority to US07/225,870 priority patent/US4994872A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42356—Disposition, e.g. buried gate electrode
    • H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
JP52001756A 1977-01-11 1977-01-11 絶縁ゲ−ト型静電誘導電界効果トランジスタ Expired JPS5856270B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP52001756A JPS5856270B2 (ja) 1977-01-11 1977-01-11 絶縁ゲ−ト型静電誘導電界効果トランジスタ
DE19782801085 DE2801085A1 (de) 1977-01-11 1978-01-11 Statischer induktionstransistor
US06/814,030 US4814839A (en) 1977-01-11 1985-12-23 Insulated gate static induction transistor and integrated circuit including same
US07/225,870 US4994872A (en) 1977-01-11 1988-07-29 Insulated gate static induction transistor and integrated circuit including same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52001756A JPS5856270B2 (ja) 1977-01-11 1977-01-11 絶縁ゲ−ト型静電誘導電界効果トランジスタ

Publications (2)

Publication Number Publication Date
JPS53146577A true JPS53146577A (en) 1978-12-20
JPS5856270B2 JPS5856270B2 (ja) 1983-12-14

Family

ID=11510415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52001756A Expired JPS5856270B2 (ja) 1977-01-11 1977-01-11 絶縁ゲ−ト型静電誘導電界効果トランジスタ

Country Status (1)

Country Link
JP (1) JPS5856270B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768075A (en) * 1980-10-16 1982-04-26 Nippon Gakki Seizo Kk Manufacture of integrated circuit device
JPS57211277A (en) * 1981-06-23 1982-12-25 Seiko Instr & Electronics Ltd Insulating gate type electrostatic induction transistor and manufacture thereof
JPS60207368A (ja) * 1984-03-31 1985-10-18 Res Dev Corp Of Japan 相補型ｍｏｓ集積回路の製造方法
US4931850A (en) * 1985-07-05 1990-06-05 Matsushita Electric Industrial Co., Ltd. Semiconductor device including a channel stop region
JPH02205362A (ja) * 1988-12-28 1990-08-15 American Teleph & Telegr Co <Att> ＧａＡｓ集積回路およびその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5768075A (en) * 1980-10-16 1982-04-26 Nippon Gakki Seizo Kk Manufacture of integrated circuit device
JPS57211277A (en) * 1981-06-23 1982-12-25 Seiko Instr & Electronics Ltd Insulating gate type electrostatic induction transistor and manufacture thereof
JPS60207368A (ja) * 1984-03-31 1985-10-18 Res Dev Corp Of Japan 相補型ｍｏｓ集積回路の製造方法
JPH0519312B2 (ja) * 1984-03-31 1993-03-16 Shingijutsu Jigyodan
US4931850A (en) * 1985-07-05 1990-06-05 Matsushita Electric Industrial Co., Ltd. Semiconductor device including a channel stop region
JPH02205362A (ja) * 1988-12-28 1990-08-15 American Teleph & Telegr Co <Att> ＧａＡｓ集積回路およびその製造方法

Also Published As

Publication number Publication date
JPS5856270B2 (ja) 1983-12-14

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