JPS5314472B2 - - Google Patents
Info
- Publication number
- JPS5314472B2 JPS5314472B2 JP864275A JP864275A JPS5314472B2 JP S5314472 B2 JPS5314472 B2 JP S5314472B2 JP 864275 A JP864275 A JP 864275A JP 864275 A JP864275 A JP 864275A JP S5314472 B2 JPS5314472 B2 JP S5314472B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864275A JPS5184580A (ja) | 1975-01-22 | 1975-01-22 | Gasuetsuchingusochi |
| US05/647,448 US4123663A (en) | 1975-01-22 | 1976-01-08 | Gas-etching device |
| DE2601288A DE2601288B2 (de) | 1975-01-22 | 1976-01-15 | Gas-Ätzvorrichtung |
| US05/933,846 US4192706A (en) | 1975-01-22 | 1978-08-15 | Gas-etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864275A JPS5184580A (ja) | 1975-01-22 | 1975-01-22 | Gasuetsuchingusochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5184580A JPS5184580A (ja) | 1976-07-23 |
| JPS5314472B2 true JPS5314472B2 (enExample) | 1978-05-17 |
Family
ID=11698595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP864275A Granted JPS5184580A (ja) | 1975-01-22 | 1975-01-22 | Gasuetsuchingusochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5184580A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244174A (en) * | 1975-10-06 | 1977-04-06 | Hitachi Ltd | Plasma treatment device |
| JPS5329065A (en) * | 1976-08-31 | 1978-03-17 | Toshiba Corp | Vapour phase reaction unit of semiconductor |
| JPS5384684A (en) * | 1976-12-29 | 1978-07-26 | Fujitsu Ltd | Plasma etching device |
| JPS552199U (enExample) * | 1979-07-05 | 1980-01-09 | ||
| JPS59145530A (ja) * | 1983-12-23 | 1984-08-21 | Hitachi Ltd | プラズマ処理装置 |
-
1975
- 1975-01-22 JP JP864275A patent/JPS5184580A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5184580A (ja) | 1976-07-23 |