JPS5341505B2 - - Google Patents
Info
- Publication number
- JPS5341505B2 JPS5341505B2 JP11976975A JP11976975A JPS5341505B2 JP S5341505 B2 JPS5341505 B2 JP S5341505B2 JP 11976975 A JP11976975 A JP 11976975A JP 11976975 A JP11976975 A JP 11976975A JP S5341505 B2 JPS5341505 B2 JP S5341505B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11976975A JPS5244174A (en) | 1975-10-06 | 1975-10-06 | Plasma treatment device |
| GB41345/76A GB1550853A (en) | 1975-10-06 | 1976-10-05 | Apparatus and process for plasma treatment |
| US05/729,987 US4123316A (en) | 1975-10-06 | 1976-10-06 | Plasma processor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11976975A JPS5244174A (en) | 1975-10-06 | 1975-10-06 | Plasma treatment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5244174A JPS5244174A (en) | 1977-04-06 |
| JPS5341505B2 true JPS5341505B2 (enExample) | 1978-11-04 |
Family
ID=14769726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11976975A Granted JPS5244174A (en) | 1975-10-06 | 1975-10-06 | Plasma treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5244174A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56155535A (en) * | 1980-05-02 | 1981-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Film forming device utilizing plasma |
| JPS5779621A (en) * | 1980-11-05 | 1982-05-18 | Mitsubishi Electric Corp | Plasma processing device |
| AU8288282A (en) * | 1981-05-04 | 1982-11-11 | Optical Coating Laboratory, Inc. | Production and utilization of activated molecular beams |
| JPS60257130A (ja) * | 1984-06-01 | 1985-12-18 | Res Dev Corp Of Japan | ラジカルビ−ムを用いた薄膜形成方法 |
| JPH0967191A (ja) * | 1995-08-29 | 1997-03-11 | Komatsu Ltd | ガス噴射による表面処理装置 |
| AU3926901A (en) * | 2000-02-24 | 2001-09-03 | Ccr Gmbh Beschichtungstechnologie | High frequency plasma source |
| JP5638841B2 (ja) | 2010-06-01 | 2014-12-10 | 株式会社ダイフレックス | コンクリート片及びタイルの剥落防止用一成分型ポリウレタン樹脂組成物及びこれを用いたコンクリート片及びタイルの剥落を防止する方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5184580A (ja) * | 1975-01-22 | 1976-07-23 | Tokyo Shibaura Electric Co | Gasuetsuchingusochi |
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1975
- 1975-10-06 JP JP11976975A patent/JPS5244174A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5244174A (en) | 1977-04-06 |