JPS53144675A - Electron beam mask and production of the same - Google Patents

Electron beam mask and production of the same

Info

Publication number
JPS53144675A
JPS53144675A JP5887777A JP5887777A JPS53144675A JP S53144675 A JPS53144675 A JP S53144675A JP 5887777 A JP5887777 A JP 5887777A JP 5887777 A JP5887777 A JP 5887777A JP S53144675 A JPS53144675 A JP S53144675A
Authority
JP
Japan
Prior art keywords
electron beam
production
same
beam mask
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5887777A
Other languages
Japanese (ja)
Other versions
JPS5416390B2 (en
Inventor
Kiichi Takamoto
Kunio Koyabu
Yoshiaki Mimura
Hideo Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5887777A priority Critical patent/JPS53144675A/en
Publication of JPS53144675A publication Critical patent/JPS53144675A/en
Publication of JPS5416390B2 publication Critical patent/JPS5416390B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To produce an electron beam mask which has a thickness and mechanical strength sufficient for handling and is easy to fix to a holding jig.
COPYRIGHT: (C)1978,JPO&Japio
JP5887777A 1977-05-23 1977-05-23 Electron beam mask and production of the same Granted JPS53144675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5887777A JPS53144675A (en) 1977-05-23 1977-05-23 Electron beam mask and production of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5887777A JPS53144675A (en) 1977-05-23 1977-05-23 Electron beam mask and production of the same

Publications (2)

Publication Number Publication Date
JPS53144675A true JPS53144675A (en) 1978-12-16
JPS5416390B2 JPS5416390B2 (en) 1979-06-21

Family

ID=13096979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5887777A Granted JPS53144675A (en) 1977-05-23 1977-05-23 Electron beam mask and production of the same

Country Status (1)

Country Link
JP (1) JPS53144675A (en)

Also Published As

Publication number Publication date
JPS5416390B2 (en) 1979-06-21

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