JPS5312784A - Method and apparatus for transferring substrates in vacuum - Google Patents

Method and apparatus for transferring substrates in vacuum

Info

Publication number
JPS5312784A
JPS5312784A JP8781976A JP8781976A JPS5312784A JP S5312784 A JPS5312784 A JP S5312784A JP 8781976 A JP8781976 A JP 8781976A JP 8781976 A JP8781976 A JP 8781976A JP S5312784 A JPS5312784 A JP S5312784A
Authority
JP
Japan
Prior art keywords
vacuum
substrates
transferring substrates
screw shaft
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8781976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440393B2 (cs
Inventor
Yoshihiro Hirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP8781976A priority Critical patent/JPS5312784A/ja
Publication of JPS5312784A publication Critical patent/JPS5312784A/ja
Publication of JPS5440393B2 publication Critical patent/JPS5440393B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP8781976A 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum Granted JPS5312784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8781976A JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8781976A JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Publications (2)

Publication Number Publication Date
JPS5312784A true JPS5312784A (en) 1978-02-04
JPS5440393B2 JPS5440393B2 (cs) 1979-12-03

Family

ID=13925565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8781976A Granted JPS5312784A (en) 1976-07-22 1976-07-22 Method and apparatus for transferring substrates in vacuum

Country Status (1)

Country Link
JP (1) JPS5312784A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5980466U (ja) * 1982-11-20 1984-05-31 ティーディーケイ株式会社 蒸着装置
JPS60144234U (ja) * 1984-03-05 1985-09-25 株式会社日立国際電気 シリコン縦形エピタキシヤル成長装置
US5496861A (en) * 1990-11-19 1996-03-05 National Starch And Chemical Investment Holding Corporation Cosmetics containing enzymatically debranched starch

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5980466U (ja) * 1982-11-20 1984-05-31 ティーディーケイ株式会社 蒸着装置
JPS60144234U (ja) * 1984-03-05 1985-09-25 株式会社日立国際電気 シリコン縦形エピタキシヤル成長装置
US5496861A (en) * 1990-11-19 1996-03-05 National Starch And Chemical Investment Holding Corporation Cosmetics containing enzymatically debranched starch

Also Published As

Publication number Publication date
JPS5440393B2 (cs) 1979-12-03

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