JPS5214370A - Baking device - Google Patents

Baking device

Info

Publication number
JPS5214370A
JPS5214370A JP9028375A JP9028375A JPS5214370A JP S5214370 A JPS5214370 A JP S5214370A JP 9028375 A JP9028375 A JP 9028375A JP 9028375 A JP9028375 A JP 9028375A JP S5214370 A JPS5214370 A JP S5214370A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
baking device
baking
magnetron
wafer
japio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9028375A
Inventor
Akira Minoguchi
Tamotsu Sasaki
Yoshisada Ushijima
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To make baking in large amount in the short time by using the high frequency heating by magnetron and the transport of wafer by air.
COPYRIGHT: (C)1977,JPO&Japio
JP9028375A 1975-07-25 1975-07-25 Baking device Pending JPS5214370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9028375A JPS5214370A (en) 1975-07-25 1975-07-25 Baking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9028375A JPS5214370A (en) 1975-07-25 1975-07-25 Baking device

Publications (1)

Publication Number Publication Date
JPS5214370A true true JPS5214370A (en) 1977-02-03

Family

ID=13994176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9028375A Pending JPS5214370A (en) 1975-07-25 1975-07-25 Baking device

Country Status (1)

Country Link
JP (1) JPS5214370A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522832A (en) * 1978-08-03 1980-02-18 Matsushita Electric Ind Co Ltd Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus
JPS58135643U (en) * 1982-03-05 1983-09-12
US4593168A (en) * 1983-02-21 1986-06-03 Hitachi, Ltd. Method and apparatus for the heat-treatment of a plate-like member
US4622447A (en) * 1982-04-09 1986-11-11 Fujitsu Limited Microwave apparatus for vacuum treating and heating a semiconductor substrate
US4683363A (en) * 1981-09-17 1987-07-28 Itt Industries Inc. Microwave apparatus for processing semiconductor
US6172322B1 (en) * 1997-11-07 2001-01-09 Applied Technology, Inc. Annealing an amorphous film using microwave energy

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522832A (en) * 1978-08-03 1980-02-18 Matsushita Electric Ind Co Ltd Semiconconductor manufacturing apparatus and method of manufacturing semiconductor device by use of its apparatus
US4683363A (en) * 1981-09-17 1987-07-28 Itt Industries Inc. Microwave apparatus for processing semiconductor
JPS58135643U (en) * 1982-03-05 1983-09-12
US4622447A (en) * 1982-04-09 1986-11-11 Fujitsu Limited Microwave apparatus for vacuum treating and heating a semiconductor substrate
US4593168A (en) * 1983-02-21 1986-06-03 Hitachi, Ltd. Method and apparatus for the heat-treatment of a plate-like member
US4667076A (en) * 1983-02-21 1987-05-19 Hitachi, Ltd. Method and apparatus for microwave heat-treatment of a semiconductor water
US6172322B1 (en) * 1997-11-07 2001-01-09 Applied Technology, Inc. Annealing an amorphous film using microwave energy

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