JPS5312377A - Inspecting apparatus for surface - Google Patents

Inspecting apparatus for surface

Info

Publication number
JPS5312377A
JPS5312377A JP8638776A JP8638776A JPS5312377A JP S5312377 A JPS5312377 A JP S5312377A JP 8638776 A JP8638776 A JP 8638776A JP 8638776 A JP8638776 A JP 8638776A JP S5312377 A JPS5312377 A JP S5312377A
Authority
JP
Japan
Prior art keywords
inspected surface
inspecting apparatus
defect
ellumination
flashing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8638776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5735788B2 (enrdf_load_stackoverflow
Inventor
Yoshio Tomioka
Toyoji Maruyama
Nobumasa Oya
Akira Sudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Steel Corp
Original Assignee
Fujitsu Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Steel Corp filed Critical Fujitsu Ltd
Priority to JP8638776A priority Critical patent/JPS5312377A/ja
Publication of JPS5312377A publication Critical patent/JPS5312377A/ja
Publication of JPS5735788B2 publication Critical patent/JPS5735788B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8638776A 1976-07-20 1976-07-20 Inspecting apparatus for surface Granted JPS5312377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8638776A JPS5312377A (en) 1976-07-20 1976-07-20 Inspecting apparatus for surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8638776A JPS5312377A (en) 1976-07-20 1976-07-20 Inspecting apparatus for surface

Publications (2)

Publication Number Publication Date
JPS5312377A true JPS5312377A (en) 1978-02-03
JPS5735788B2 JPS5735788B2 (enrdf_load_stackoverflow) 1982-07-30

Family

ID=13885455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8638776A Granted JPS5312377A (en) 1976-07-20 1976-07-20 Inspecting apparatus for surface

Country Status (1)

Country Link
JP (1) JPS5312377A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698636A (en) * 1980-06-09 1981-08-08 Dainippon Printing Co Ltd Printed matter testing device
JPS5868651A (ja) * 1981-10-20 1983-04-23 Konishiroku Photo Ind Co Ltd 感光性フイルムの表面検査装置
US4493554A (en) * 1979-02-27 1985-01-15 Diffracto Method and apparatus for determining physical characteristics of objects and object surfaces

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63157294U (enrdf_load_stackoverflow) * 1987-04-03 1988-10-14

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829482A (enrdf_load_stackoverflow) * 1971-08-16 1973-04-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829482A (enrdf_load_stackoverflow) * 1971-08-16 1973-04-19

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4493554A (en) * 1979-02-27 1985-01-15 Diffracto Method and apparatus for determining physical characteristics of objects and object surfaces
JPS5698636A (en) * 1980-06-09 1981-08-08 Dainippon Printing Co Ltd Printed matter testing device
JPS5868651A (ja) * 1981-10-20 1983-04-23 Konishiroku Photo Ind Co Ltd 感光性フイルムの表面検査装置

Also Published As

Publication number Publication date
JPS5735788B2 (enrdf_load_stackoverflow) 1982-07-30

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