JPS53119496A - Electron ray expososing method - Google Patents

Electron ray expososing method

Info

Publication number
JPS53119496A
JPS53119496A JP3414277A JP3414277A JPS53119496A JP S53119496 A JPS53119496 A JP S53119496A JP 3414277 A JP3414277 A JP 3414277A JP 3414277 A JP3414277 A JP 3414277A JP S53119496 A JPS53119496 A JP S53119496A
Authority
JP
Japan
Prior art keywords
expososing
electron ray
electron
ray
ray expososing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3414277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5646254B2 (enExample
Inventor
Tetsuo Yuasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP3414277A priority Critical patent/JPS53119496A/ja
Publication of JPS53119496A publication Critical patent/JPS53119496A/ja
Publication of JPS5646254B2 publication Critical patent/JPS5646254B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3414277A 1977-03-28 1977-03-28 Electron ray expososing method Granted JPS53119496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414277A JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414277A JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Publications (2)

Publication Number Publication Date
JPS53119496A true JPS53119496A (en) 1978-10-18
JPS5646254B2 JPS5646254B2 (enExample) 1981-10-31

Family

ID=12405953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414277A Granted JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Country Status (1)

Country Link
JP (1) JPS53119496A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831538A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 樹脂封止用金型装置
JPS6193214U (enExample) * 1984-11-14 1986-06-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501783A (enExample) * 1973-05-02 1975-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501783A (enExample) * 1973-05-02 1975-01-09

Also Published As

Publication number Publication date
JPS5646254B2 (enExample) 1981-10-31

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