JPS5646254B2 - - Google Patents

Info

Publication number
JPS5646254B2
JPS5646254B2 JP3414277A JP3414277A JPS5646254B2 JP S5646254 B2 JPS5646254 B2 JP S5646254B2 JP 3414277 A JP3414277 A JP 3414277A JP 3414277 A JP3414277 A JP 3414277A JP S5646254 B2 JPS5646254 B2 JP S5646254B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3414277A
Other languages
Japanese (ja)
Other versions
JPS53119496A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3414277A priority Critical patent/JPS53119496A/ja
Publication of JPS53119496A publication Critical patent/JPS53119496A/ja
Publication of JPS5646254B2 publication Critical patent/JPS5646254B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3414277A 1977-03-28 1977-03-28 Electron ray expososing method Granted JPS53119496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414277A JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414277A JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Publications (2)

Publication Number Publication Date
JPS53119496A JPS53119496A (en) 1978-10-18
JPS5646254B2 true JPS5646254B2 (enExample) 1981-10-31

Family

ID=12405953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414277A Granted JPS53119496A (en) 1977-03-28 1977-03-28 Electron ray expososing method

Country Status (1)

Country Link
JP (1) JPS53119496A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831538A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 樹脂封止用金型装置
JPS6193214U (enExample) * 1984-11-14 1986-06-16

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5235545B2 (enExample) * 1973-05-02 1977-09-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831538A (ja) * 1981-08-19 1983-02-24 Toshiba Corp 樹脂封止用金型装置
JPS6193214U (enExample) * 1984-11-14 1986-06-16

Also Published As

Publication number Publication date
JPS53119496A (en) 1978-10-18

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