JPS53114459A - Thickness measuring system of radiation type - Google Patents
Thickness measuring system of radiation typeInfo
- Publication number
- JPS53114459A JPS53114459A JP2902077A JP2902077A JPS53114459A JP S53114459 A JPS53114459 A JP S53114459A JP 2902077 A JP2902077 A JP 2902077A JP 2902077 A JP2902077 A JP 2902077A JP S53114459 A JPS53114459 A JP S53114459A
- Authority
- JP
- Japan
- Prior art keywords
- measuring system
- thickness measuring
- radiation type
- sample
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
PURPOSE: To accomplish the correct measurement of a sample without any influence from the mass absorption coefficient of the sample by deducing the mass absorption coefficient corresponding to the reference value of thickness in accordance with the corelation between the thicknes of the sample and the mass absorption coefficient and by suing the coefficient as a coefficient for thickness calculation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2902077A JPS5831843B2 (en) | 1977-03-16 | 1977-03-16 | Radiation thickness measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2902077A JPS5831843B2 (en) | 1977-03-16 | 1977-03-16 | Radiation thickness measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53114459A true JPS53114459A (en) | 1978-10-05 |
JPS5831843B2 JPS5831843B2 (en) | 1983-07-08 |
Family
ID=12264720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2902077A Expired JPS5831843B2 (en) | 1977-03-16 | 1977-03-16 | Radiation thickness measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5831843B2 (en) |
-
1977
- 1977-03-16 JP JP2902077A patent/JPS5831843B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5831843B2 (en) | 1983-07-08 |
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