JPS53114459A - Thickness measuring system of radiation type - Google Patents

Thickness measuring system of radiation type

Info

Publication number
JPS53114459A
JPS53114459A JP2902077A JP2902077A JPS53114459A JP S53114459 A JPS53114459 A JP S53114459A JP 2902077 A JP2902077 A JP 2902077A JP 2902077 A JP2902077 A JP 2902077A JP S53114459 A JPS53114459 A JP S53114459A
Authority
JP
Japan
Prior art keywords
measuring system
thickness measuring
radiation type
sample
coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2902077A
Other languages
Japanese (ja)
Other versions
JPS5831843B2 (en
Inventor
Shigehiko Yamamoto
Akio Fujiwara
Kiyoshi Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP2902077A priority Critical patent/JPS5831843B2/en
Publication of JPS53114459A publication Critical patent/JPS53114459A/en
Publication of JPS5831843B2 publication Critical patent/JPS5831843B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE: To accomplish the correct measurement of a sample without any influence from the mass absorption coefficient of the sample by deducing the mass absorption coefficient corresponding to the reference value of thickness in accordance with the corelation between the thicknes of the sample and the mass absorption coefficient and by suing the coefficient as a coefficient for thickness calculation.
COPYRIGHT: (C)1978,JPO&Japio
JP2902077A 1977-03-16 1977-03-16 Radiation thickness measuring device Expired JPS5831843B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2902077A JPS5831843B2 (en) 1977-03-16 1977-03-16 Radiation thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2902077A JPS5831843B2 (en) 1977-03-16 1977-03-16 Radiation thickness measuring device

Publications (2)

Publication Number Publication Date
JPS53114459A true JPS53114459A (en) 1978-10-05
JPS5831843B2 JPS5831843B2 (en) 1983-07-08

Family

ID=12264720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2902077A Expired JPS5831843B2 (en) 1977-03-16 1977-03-16 Radiation thickness measuring device

Country Status (1)

Country Link
JP (1) JPS5831843B2 (en)

Also Published As

Publication number Publication date
JPS5831843B2 (en) 1983-07-08

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